Side ViewTop View Beginning from a silicon wafer.

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Presentation transcript:

Side ViewTop View Beginning from a silicon wafer

Side ViewTop View Thermal Oxidation

Side ViewTop View Spin-on Photo Resist (PR)

Side ViewTop View Alignment, UV Expose and Develop Photo Resist (PR)

Side ViewTop View Oxide Etched

Side ViewTop View Remove Photo Resist (PR)

Side ViewTop View Doping (implantation or diffusion)

Side ViewTop View Grow Field Oxide (wet/dry) and dopant diffusion

Side ViewTop View Spin-on Photo Resist (PR)

Side ViewTop View Alignment, UV Expose and Develop Photo Resist (PR)

Side ViewTop View Oxide Etched

Side ViewTop View Remove Photo Resist (PR)

Side ViewTop View Grow Gate Oxide (dry)

Side ViewTop View Spin-on Photo Resist (PR)

Side ViewTop View Alignment, UV Expose and Develop Photo Resist (PR)

Side ViewTop View Field Oxide Etched

Side ViewTop View Field Oxide Etched

Side ViewTop View Metal (e.g., Aluminum) deposition

Side ViewTop View Spin-on Photo Resist (PR)

Side ViewTop View Alignment, UV Expose and Develop Photo Resist (PR)

Side ViewTop View Aluminum Etched

Side ViewTop View Remove Photo Resist (PR), annealing - complete