TXZ Heated Gas Line and Hot Box Valve Replacements Spire

Chamber 2/3 Upper Process Gas Line and Final Gas Line Assembly

Chamber 3 Mid Process Gas Line

TXZ Hot Box Valve Replacements

 Spire has replaced the standard Swagelok valves used for the hotbox and final line with valves from Fujikin. These valves are rated at 80°C, vs. 65°C for the Swagelok valves.

 In an effort to remove sharp corners that can create cold spots for liquid to pool in and create a source for particles, the standard micro-fit 90° & 45° weld fittings can be replaced with sweeping bends. Spire will modify lines to meet the needs of our customers. Below is an example requested by some customers.

Using swept 90° bends allows for a tighter fit of the heat trace against the corners of the gas lines. This in turn allows for a more uniform heating of the gas line assembly, and decreases the chances of developing cold spots, where TDMAT can build up and cause particle failures.

Testing  Spire will helium leak check all gas lines and valve assemblies to verify integrity.  All heated lines are heated to process temp and all TCs tested for functionality, as well as to verify constant temp across the assembly.