Jongbaeg Kim, Dane Christensen, and Liwei Lin 2-D Scanning Mirror Using Plastically Deformed Angular Vertical Comb Drive Actuator Jongbaeg Kim, Dane Christensen, and Liwei Lin Berkeley Sensor and Actuator Center TRANSDUCERS’05 The 13th International Conference on Solid-state Sensors, Actuators and Microsystems, vol. 1, pp.697-700. 2005. Teacher：Cheng-Hsien Liu Reporter：Chao-Min Chang Date：2007.4.11

PME5230 Class Presentation I Outline Introduction Design and Fabrication Experimental Results Conclusion PME5230 Class Presentation I

Digital Micro Mirror Device PME5230 Class Presentation I Introduction Digital Micro Mirror Device Texas Instruments MICROVISION PME5230 Class Presentation I

PME5230 Class Presentation I Introduction Angular Vertical Comb Wibool Piyawattanametha & Ming C. Wu. et al J.MEMS Vol. 14, NO. 6. pp. 1329-1338, 2005 Comb Drive Angular Vertical Comb Post fabrication process of the 2-D AVC scanner. PME5230 Class Presentation I

PME5230 Class Presentation I Introduction Other method J. Hsieh and W. Fang, Transducers’99, Sendai, Japan, 1999, pp.1376-1379. PME5230 Class Presentation I

PME5230 Class Presentation I Design Symmetric double sided vertical comb-drive (DSVCD) design. Schematic view of the plastically deformed 2-D scanning mirror actuator with self-aligned vertically interdigitated comb sets. PME5230 Class Presentation I

Fabrication Process flow for plastically deformed vertical actuators. Lid Wafer Batch-processed plastic deformation of microactuator torsion bars Process flow for plastically deformed vertical actuators. PME5230 Class Presentation I

PME5230 Class Presentation I Lid Wafer & Plastic Deformation Top view and side view of micropillars and electrodes fabricated on the lid wafer. PME5230 Class Presentation I

Design and Fabrication PME5230 Class Presentation I Process results SEM picture of close-up view of mirror, gimbal, and electrical isolation trenches. PME5230 Class Presentation I

PME5230 Class Presentation I Experimental results arbitrary number PME5230 Class Presentation I

PME5230 Class Presentation I Experimental results Frequency response of gimbal and mirror of the 2-D scanning mirror actuator. PME5230 Class Presentation I

PME5230 Class Presentation I Conclusion This paper has demonstrated microfabricated monolithic 2-D scanning mirrors using a three-mask process on SOI wafer with a single plastic deformation step. The measured dynamic characteristics show resonant frequencies of 10.56 and 1.54 kHz with optical scanning angles up to 27° and 20° with respect to mirror and gimbal axes, respectively. After 90 days of full-time operation, the scan angle deviations in each directional motion are negligible and we believe the 2-D actuator is reliable. PME5230 Class Presentation I

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Electrostatic scanning micromirrors using localized plastic deformation of silicon Process flow for the self-aligned plastic deformation using localized heating to make scanning micromirrors. PME5230 Class Presentation I

Electrostatic scanning micromirrors using localized plastic deformation of silicon PME5230 Class Presentation I