National laboratory for advanced Tecnologies and nAnoSCience Nanowires growth and devices applications Trieste, 7.12.05 Growth mechanism and methods Devices.

Slides:



Advertisements
Similar presentations
Opto-Electronics & Materials Laboratory Li-Jen Chou ( ) Investigations on low-dimensional nanostructures: synthesis, characterization, applications and.
Advertisements

Abteilung Festkörperphysik Solid State Physics University of Ulm Abteilung Festkörperphysik Solid State Physics University of Ulm Note that 1µm =
(and briefly, Electrodeposition)
Nanowires growth and devices applications
Module A-2: SYNTHESIS & ASSEMBLY
Pulsed laser deposition of oxide epitaxial thin films
" On trying daring ideas with Herb". P.M.Petroff Professor Emeritus Materials Department, University of California, Santa Barbara.
Nano Fabrication Nano Fabrication.
Semiconductor Devices 21
Graphene & Nanowires: Applications Kevin Babb & Petar Petrov Physics 141A Presentation March 5, 2013.
Silicon Nanowire based Solar Cells
Boris N. Chichkov Leibniz University Hannover
Heraklion, 2014 Si/SiC Nanowire Growth by using Al Catalyst Linsheng Liu.
Nanowire Presentation Alexandra Ford 4/9/08 NSE 203/EE 235.
Laser-Assisted Catalytic Growth (LCG) of Nanowires
Silvano De Franceschi Laboratorio Nazionale TASC INFM-CNR, Trieste, Italy  Nanowire growth and properties.
Alloy Formation at the Co-Al Interface for Thin Co Films Deposited on Al(001) and Al(110) Surfaces at Room Temperature* N.R. Shivaparan, M.A. Teter, and.
Properties of Suspended ZnO Nanowire Field-Effect Transistor
9. Semiconductors Optics Absorption and gain in semiconductors Principle of semiconductor lasers (diode lasers) Low dimensional materials: Quantum wells,
Synthesis Methods Bottom up:. Chapter 4 One-Dimensional Nanostructures : Nanotube, Nanowires and Nanorods.
The Deposition Process
Tanaka Lab. Yasushi Fujiwara Three dimensional patterned MgO substrates ~ fabrication of FZO nanowire structure~
Optical properties and carrier dynamics of self-assembled GaN/AlGaN quantum dots Ashida lab. Nawaki Yohei Nanotechnology 17 (2006)
McGill Nanotools Microfabrication Processes
Nanomaterials - carbon fullerenes and nanotubes Lecture 3 郭修伯.
1 Research Progress of Prof. Dai David Ji Mar
Highly Ordered Nano-Structured Templates: Enabling New Devices, Sensors, and Transducers Student:Gilad A. Kusne (1st Year PhD) Professors:D. N. Lambeth.
NANOFABRICATION -3 NOVEL PROCESSES EEE5425 Introduction to Nanotechnology1.
Nanostructure Formation: 1-D
Synthesis and Applications of Semiconductor Nanowires Group 17 余承曄 F Graduate Institute of Electronics Engineering, NTU Nanoelectronics.
Information Technology and Materials Science Merger of nanophase with microstructures Information is acquired through sensors The hottest topic in materials.
Optical Characterization of GaN-based Nanowires : From Nanometric Scale to Light Emitting Devices A-L. Bavencove*, E. Pougeoise, J. Garcia, P. Gilet, F.
Spin Dependent Transport Properties of Magnetic Nanostructures Amédée d’Aboville, with Dr. J. Philip, Dr. S. Kang, with Dr. J. Philip, Dr. S. Kang, J.
Modeling of semiconductor nanowires
Thin Films and Diffusion. Diffusion is not constant across cross section, and continues with every subsequent high-temperature step; hence, we use.
ECEE 302 Electronic Devices Drexel University ECE Department BMF-Lecture Page -1 Copyright © 2002 Barry Fell 23 September 2002 ECEE 302: Electronic.
Growth and impurity doping of compound semiconductor nanowires Solid State Physics, Lund University, Lund E. Norberg, P. Wickert, H. Nilsson, J. Trägårdh,
Effects of supersaturation on the crystal structure of gold seeded III–V nanowires 1 Jonas Johansson, 2 Lisa S. Karlsson, 1 Kimberly A. Dick, 1 Jessica.
Crystal Growth of III/V Semiconductor Nanowires Kobi Greenberg.
Techniques for Synthesis of Nano-materials
Fabrication of oxide nanostructure using Sidewall Growth 田中研 M1 尾野篤志.
Nanoscale Chemistry in One-dimension Peidong Yang, University of California, Berkeley, NSF-CAREER DMR Platonic Gold Nanocrystals Known to the ancient.
Basic Science of Nanomaterials (Ch. 11)
Heterostructures & Optoelectronic Devices
1-D Nanorods Remember: –Tomorrow (4/30): Lab #2 report is due –Monday (5/4): Paper w/ group members name, , project topic is due –Wed (5/6): Alissa.
Ferromagnetic Quantum Dots on Semiconductor Nanowires
Photonics and Semiconductor Nanophysics Paul Koenraad, Andrea Fiore, Erik Bakkers & Jaime Gomez-Rivas COBRA Inter-University Research Institute on Communication.
ALD Thin Film Materials LDRD review 2009NuFact09.
0-D, 1-D, 2-D Structures (not a chapter in our book!)
The Structure and Dynamics of Solids
1 ADC 2003 Nano Ni dot Effect on the structure of tetrahedral amorphous carbon films Churl Seung Lee, Tae Young Kim, Kwang-Ryeol Lee, Ki Hyun Yoon* Future.
Form Quantum Wires and Quantum Dots on Surfaces
The Vapor-Liquid-Solid growth mechanism VLS growth occurs when an alloy droplet starting from a metal catalyst becomes supersaturated with material from.
Diodes II: Fabrication by Doping MS&E 362: Materials Lab III Nov. 8.
Mar 24 th, 2016 Inorganic Material Chemistry. Gas phase physical deposition 1.Sputtering deposition 2.Evaporation 3.Plasma deposition.
II-VI Semiconductor Materials, Devices, and Applications
ZnO Nanostructures Grown by Pulsed Laser Deposition
Bandgap (eV) Lattice Constant (Å) Wavelength ( ㎛ ) GaN AlN InN 6H-SiC ZnO AlP GaP AlAs.
Crystal α-Si 3 N 4 / Si-SiO x core-shell / Au-SiO x peapod-like axial triple heterostructure Tian-Xiao Nie, †, ‡ Zhi-Gang Chen, ‡ Yue-Qin Wu, † Yanan Guo,
Deposition Techniques
SHINE: S eattle’s H ub for I ndustry-driven N anotechnology E ducation North Seattle College Nanotechnology Fabrication.
Why MOCVD and GaAs nanowires?
Nitride semiconductors and their applications
Enhanced Growth and Field Emission of Carbon Nanotube by Nitrogen Incorporation: The First Principle Study Hyo-Shin Ahn*, Seungwu Han†, Do Yeon Kim§, Kwang-Ryeol.
d ~ r Results Characterization of GaAsP NWs grown on Si substrates
Centro de Investigación y de Estudios Avanzados del Institúto Politécnico Nacional (Cinvestav IPN) Palladium Nanoparticles Formation in Si Substrates from.
Fabrication of GaAs nanowires for solar cell devices
Synthesis and Applications of Semiconductor Nanowires
Multiscale Modeling and Simulation of Nanoengineering:
Epitaxial Deposition
Presentation transcript:

national laboratory for advanced Tecnologies and nAnoSCience Nanowires growth and devices applications Trieste, Growth mechanism and methods Devices examples

national laboratory for advanced Tecnologies and nAnoSCience One dimensional nanostructures obtained by higly anisotropic growth Single crystal “bottom up” approache Not embedded in a matrix (≠ QWs, T-wires, self assembled Qdots) Nanodevices Interconnection in nano-optoelectronics Photonic crystal

national laboratory for advanced Tecnologies and nAnoSCience similar results obtained with: Pt, Ag, Pd, Cu and Ni (111) oriented Si “whiskers”: a small Au particle on a Si(111) surface heated at 950° exposed to a flow of SiCl 4 and H 2

national laboratory for advanced Tecnologies and nAnoSCience Experimental evidences: no axial screw dislocation an “impurity” is essential a small “globule” is present at the tip of the whiskers during the growth The VLS model: The impurity melt at the surface making an alloy The liquid droplet is the preferred site for deposition and become supersaturated The whiskers grow by precipitation of Si from the droplet The role of the impurity is to form a liquid alloy droplet at relatively low T. The selection of the impurity is important.

national laboratory for advanced Tecnologies and nAnoSCience Wu et al, J. Am. Chem. Soc. 123, 3165 (01) VLS growth of Ge nanowires with Au catalyst Ge particles+ Au nanoparticles on a TEM grid. T= 500° CT=800 ° C

national laboratory for advanced Tecnologies and nAnoSCience Different growth methods: laser ablation, thermal evaporation, MOCVD, MOVPE, CBE, MBE Different catalyst shape and processing: uniform layer, nanoparticle, patterned layer Different substrates: no substrate, oxide, oriented wafer, looking for oriented NWs

national laboratory for advanced Tecnologies and nAnoSCience Laser catalytic growth of Si NW with the Si 0.9 Fe 0.1 target Morales et al, Science 279, 208 (98) 100 nm 10 nm

national laboratory for advanced Tecnologies and nAnoSCience Duan et al APL 76, 1116 (2000) Laser catalitic growth of GaAs NWs using (GaAs) 0.95 M 0.05 target (M=Au, Ag, Cu) single cristal (111) GaAs nanowires Au is present at the tip. 5 μm 50 nm 5 nm 20 nm

national laboratory for advanced Tecnologies and nAnoSCience Self catalitic growth of GaN NWs Stach et al, Nano Lett. 3, 867 (2003) self standing GaN layer thinned for TEM (≤ 300 nm) heated at 1050° C in a TEM Above 850 in high vacuum GaN(s) ―› Ga (l) N (g) N 2 (g) GaN(s) ―› GaN (g) or [GaN] x (g) in-situ study of the decomposition and resulting nanostructure evolution

national laboratory for advanced Tecnologies and nAnoSCience room temperature analysis of the nanostructures: single crystal GaN NWs [0001] oriented av diameter 50 nm gr rate 300 nm/s self catalytic process could be important to avoid undesired contamination from foreign metal atom (catalyst)

national laboratory for advanced Tecnologies and nAnoSCience Zhang et al APL 84, 2641 (2004) MOCVD grown ZnSe NWs on Si(100) uniform 1 nm Au catalyst 2 μm 200nm

national laboratory for advanced Tecnologies and nAnoSCience Gudiksen et al, J. Phys. Chem. B 105, 4062 (2001) 9.7±1.0 nm 19.9±3.0 nm 30.0±6.0 nm Control of Diameter and lenght of NW InP NW grown by laser ablation Si/SiO 2 substrate size selected Au nanocluster solution

national laboratory for advanced Tecnologies and nAnoSCience Bhunia et al, APL 83, 3371 (2003) In group IV and III-V mainly [111] NW. On (111)B substrates, vertical NW! Colloidal solution of 20 nm Au particles MOVPE growth vertical NW ZB structure [111] oriented but high density of rotational twins

national laboratory for advanced Tecnologies and nAnoSCience vertical NWs array: photonic crystal? Mårtensson et al, Nanotechnology 14, 1255 (2003) EBL + metal lift-off Au discs annealing growth l= 3 μm, top Ø 50 nm l= 1 μm, top Ø 140 nm

national laboratory for advanced Tecnologies and nAnoSCience Oriented NW could be usefull for “multi-wire” devices applications However, the “easy” growth direction [111] has two important drawbacks: it is the preferable direction for forming stacking faults one needs to use the technologically unfavourable (111)B substrate orientation instead of the widely used (001)

national laboratory for advanced Tecnologies and nAnoSCience InP(001) surface Au nanoparticles + MOVPE Krishnamchari et al, APL (04) [001] NW defect free [111] NW twinned preferential orientation depend on the annealing

national laboratory for advanced Tecnologies and nAnoSCience Can VLS always explain NW’s growth? Dick et al, Nano Lett. 5, 762 (2005) 1 μm Au nanoparticles InAs NW growth by MOVPE on InAs(111)B 1.3 nm SiOx, 580° C 1 μm 1.3 nm SiOx + Au nanop., 580° C

national laboratory for advanced Tecnologies and nAnoSCience Au SiOx, SiOx+Au from Au-In phase diagram: T m = 490° % In T m = 490° % In T m = 460° % In EDS on the NW’s tip: 25-30% In in Au. growth stops when the particle melts! Au + anneal Growth rate drop is not a matter of InAs decomposition. The oxide layer reduces In incorporation in Au, and prevents melting.

national laboratory for advanced Tecnologies and nAnoSCience But also catalyst free growth of GaAs NWs! Noborisaka et al, APL 86, (05) d 0 =200 nm d 0 =50 nm Selective Area MOVPE on GaAs (111)B

national laboratory for advanced Tecnologies and nAnoSCience Huang et al, Science 292, 1897 (2001) Optically pumped NW laser ZnO on sapphire, Au catalysed [1000] growth, exagonal facets. Optical pumping at 10° from the axis, light collection in axis

national laboratory for advanced Tecnologies and nAnoSCience Single NW electrically driven laser Duan et al, Nature 421, 241 (2003) NW as optical cavity when 1≈(πD/λ)(n 1 2 -n 0 2 ) 0.5 <2.4 for CdS D≥70 nm [0001] wurzite Au cat. CdS NW 5 μm 100 nm PL excited on the NW, emission at the tip! PL collected at the NW tip: Fabry-Perot cavity!

national laboratory for advanced Tecnologies and nAnoSCience Optically pumped single mode lasing of single NW! emission from the NW end

national laboratory for advanced Tecnologies and nAnoSCience 5 μm n-type CdS wire on p+ Si wafer + EBL and contact deposition= distributed p-n junction RT electrically driven single NW lasing!!

national laboratory for advanced Tecnologies and nAnoSCience p-n junction by crossing p- and n-type NWs 5 μm electroluminescence from the NW end is modulated: optical cavity Huang et al, Pure Appl. Chem, 76,2051 (2004)

national laboratory for advanced Tecnologies and nAnoSCience Heterostructures technolgy + nanowhisker growth = one dimensional heterostructures small cross section, efficient lateral lattice relaxation one can combine different materials despite their bulk lattice mismatch CBE on GaAs(111)B 40 nm Au nanoparticles [100] oriented due to the GaAs/InAs misfit Björk et al, APL 80, 1058 (2002)

national laboratory for advanced Tecnologies and nAnoSCience single wire transport measurement: barrier height qΦB=0.6 eV InP/InAs/InP NW reference InAsNW

Core-shell heterostructures Seifert et al, JCG 272, 211 (2004) in combination with modulation doping promising canditates for 1D electron gas structures MOVPE growth: GaAs first at 450°C, then AlGaAs at 630°C. enhanced lateral growth (non VLS) strong GaAs core PL

national laboratory for advanced Tecnologies and nAnoSCience Ethanol sensing ZnO NW-based device NW ultrasonically dispersed in ethanol, dried, deposited on interdigitated Pt contacts by spin coating. Wan et al, APL 84, 3654 (2004)

In air high R due to O 2 - at the surface capturing electrons. Ethanol reduces the density of O 2 - ions and increase the electron density. enhanced sensitivity at 300°C

national laboratory for advanced Tecnologies and nAnoSCience Nanotrees by multistep seeding with Au nanoparticles GaP on GaP (111) by MOVPE Dick et al, J. Cryst. Gr. 272, 131 (2004)