Multilayer Microfluidics ENMA490 Fall 2003 Brought to you by: S. Beatty, C. Brooks, S. Dean, M. Hanna, D. Janiak, C. Kung, J. Ni, B. Sadowski, A. Samuel, K. Thaker

Problem Definition Motivation –BioMEMS research is growing rapidly, but restricted to single layer microfluidics –Development of a multilayer microfluidic design would increase flexibility Goal –Design, construct, and test a controllable microfluidic device with at least two fluid levels. –Identify appropriate materials, processes, and device geometries.

Problem Scope Requirements –To make a two-level microfluidic device –To incorporate active control elements Constraints –Assume external fluid control –Neglect biochemical reactions in channels –Keep design feasible for manufacturing

Initial Material Choices Narrowing Materials Choices Desired Mechanical and electrical properties Process considerations

Project Development

Device Design: Stage 1 (Initial Microchannel Design Concept) Device Logic

Device Design: Stage 1 (Initial Microchannel Design Concept)

Device Design: Stage 2 (Modified Microchannel Design) Device Logic

Device Design: Stage 2 (Modified Microchannel Design)

Manufacturing and experimental results

Device Design: Stage 3 (Pressure Actuated Valve Design) Device Logic

Device Design: Stage 3 (Pressure Actuated Valve Design)

Simulation PDMS deflection

Device Design: Stage 3 (Pressure Actuated Valve Design) Flow modeling

Device Design: Stage 3 (Pressure Actuated Valve Design) Manufacturing and experimental results

Alternative Designs

Future Work

Summary