Fig. 2 from Fabrication of multilayer Pb(Zr,Ti)O3 thin film by sputtering deposition for MEMS actuator applications (Image 1 of 3) Ryo Sano et al 2015.

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Fig. 2 from Fabrication of multilayer Pb(Zr,Ti)O3 thin film by sputtering deposition for MEMS actuator applications (Image 1 of 3) Ryo Sano et al 2015 Jpn. J. Appl. Phys ND03 doi: /JJAP.54.10ND03

Fig. 2 from Fabrication of multilayer Pb(Zr,Ti)O3 thin film by sputtering deposition for MEMS actuator applications (Image 2 of 3) Ryo Sano et al 2015 Jpn. J. Appl. Phys ND03 doi: /JJAP.54.10ND03

Fig. 2 from Fabrication of multilayer Pb(Zr,Ti)O3 thin film by sputtering deposition for MEMS actuator applications (Image 3 of 3) Ryo Sano et al 2015 Jpn. J. Appl. Phys ND03 doi: /JJAP.54.10ND03