Impurity flux and sputtering Shothydrogenoxygencarbontitaniumoxygencarbontitanium E E E E E E E E _M 2.63E E _M 5.66E E E E _M 5.73E E E E E E E E E E E E SputteringFlux (part./s/m2)

Impurity flux and sputtering Shot hydrogenoxygencarbontitaniumOCTi E E E E E E E E E E _M7.00E E E _M4.70E E E E E E _M7.60E E E E E E E SputteringFlux (part./s/m2)

Titanium flux Spectral lines A y 3 D o - a 3 F (ground) A y 5 F o - a 5 F (metastable) For Te=30 eV and ne= part./m 3 (S/XB) 4533 =1.65 (S/XB) 3958 =13

S/XB Titanium

Titanium flux

Plot of Impurity Flux

Plot of Impurity Sputtering