Sputtering. Why? Thin layer deposition How? Bombarding a surface with ions which knocks out molecules from a target which in turn will redeposit onto.

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Presentation transcript:

Sputtering

Why? Thin layer deposition How? Bombarding a surface with ions which knocks out molecules from a target which in turn will redeposit onto a surface

Target Sputtering Plasma

Target Sputtering Plasma Surface

Reflection Compare with evaporation – what is the main differences? Between which physical states does a molecule go? In what respect is the process similar to dry etching?