Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. Scheme of the experimental setup: 1-guided-vane pump; 2-fine ceramic porous filter;

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Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. Scheme of the experimental setup: 1-guided-vane pump; 2-fine ceramic porous filter; 3-power supply module; 4-focused laser beam; 5-capacitor bank; 6-choke coil; 7-pressure modulator; 8-nozzles; 9-material collector; 10-vacuum chamber. Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. An example of nozzle assembly with two jet electrodes. Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. Electrical scheme of the experimental setup. Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. Solid line: laser pulse. Dashed line: current trace. Dotted line: signal from SXUV pin-diode. Dot-dashed line: integrated EUV energy per pulse. Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. EUV emission spectra for different working materials. Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. Witnesses: A-circular foil sample; B1-B4-vertical glass samples. Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. θ-distribution of surface coverage by microdroplets. Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. Geometry of plasma expansion and EUV collectable angle for wheel-like electrodes (a) and jet electrodes (b). Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. Image of the exposed foil witness. Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

Date of download: 5/30/2016 Copyright © 2016 SPIE. All rights reserved. Illustration of numerical modeling of the heat transfer in nozzles. Figure Legend: From: New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes J. Micro/Nanolith. MEMS MOEMS. 2012;11(2): doi: /1.JMM

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