Optimal concentrations of Ethanol and Isopropanol for the dissolution of PMMA By Maya Costales.

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Presentation transcript:

Optimal concentrations of Ethanol and Isopropanol for the dissolution of PMMA By Maya Costales

Background Nanofabrication – Substrate – Resist – Etching Tool – Developer

Raman Spectroscopy

Thermogravimetric Analysis

Focusing Question Last Year Can Alcohol Water Solutions be used as replacements for MIBK-IPA solutions as PMMA developers?

Atomic Force Scans

Focusing Question Can we learn from Raman and TGA how PMMA and the alcohol-water mixtures interact?

Data Acquisition Protocol/Methods Raman TGA

Issues with Data Acquisition Raman Laser TGA recipe Machine Artifacts Raman data acquisition and Fluorescence

IPA-PMMA Raman Data

CH and OH stretching bands IPA

IPA-PMMA

Etoh-PMMA Raman Data

CH and OH stretching bands Etoh

Etoh-PMMA

TGA data

Conclusions 75%IPA-Water is the ideal ratio for dissolution of PMMA particles. 80% Ethanol-Water is ideal for dissolution of PMMA. Future investigations may utilize Attentuated Total Reflection (ATR) Raman Spectroscopy and Fourier Transform Infrared Spectroscopy (FTIR ). There new states in the dissolved PMMA that fluoresce when illuminated with the 514 nm (green) laser which were not observed before. Thermal decomposition is different. PMMA decomposes at lower temperatures when dissolved in ethanol-water than the other samples.

References Miller-Chou, B. (2003). A Review Of Polymer Dissolution. Progress in Polymer Science, 28, Mohammad, M., Muhammad, M., Dew, S., & Stepanova, M. (2011). Fundamentals of Electron Beam Exposure and Development. Nanofabrication Techniques and Principles, Mohammad, M., Dew, S., & Stepanova, M. (2013). SML resist processing for high-aspect-ratio and high-sensitivity electron beam lithography. Nanoscale Research Letters, 8, 139. Ohmura, R., Takeya, S., Uchida, T., & Ebinuma, T. (2004). Clathrate Hydrate Formed with Methane and 2-Propanol: Confirmation of Structure II Hydrate Formation. Industrial & Engineering Chemistry Research, 43,

Acknowledgements

Questions?