Micro and Nano Fabrication Technology Road Map and Commercialization Challenge in Japan National Institute of Advanced Industrial Science and Technology （ AIST ） Ryutaro MAEDA Principal Research Scientist Advanced Manufacturing Research Institute National Institute of Advanced Industrial Science and Technology (AIST)

Road map of Micro and Nano Fabrication Technology  Government Investment is not so large for Fabrication Technology 1 B US$ for Micro/Nano, IT based fabrication, RT and Nano materials technology 1 B US$ for Micro/Nano, IT based fabrication, RT and Nano materials technology C.f. 4.5 B US$ for bio technology, 2 B US$ for ICT, 6 B US$ for Energy C.f. 4.5 B US$ for bio technology, 2 B US$ for ICT, 6 B US$ for Energy  While 70 % of export is come from Machine, automobile industry in Japan

Road map of Micro/Nano fabrication  ROAD map can be found at; http: // //  Effective for long term planning can be separated by personal change.  Different from Electronics, target is not so simple, but diverse.  Application is not visible.

Commercialization Difficulties and solutions Business difficulties High Cost of facilities High Cost of facilities Lack of Engineers Lack of Engineers Small batch production Small batch production  Solutions Fabrication and Prototype Service Fabrication and Prototype Service Fabrication and Prototype Service Fabrication and Prototype Service Education Education Education Look for Mega hits? From commercial needs to social needs? Low Cost Process R&D Low Cost Process R&D NanoimprintNanoimprintNanoimprint Desk-top MEMS factoryDesk-top MEMS factoryDesk-top MEMS factoryDesk-top MEMS factory National Institute of Advanced Industrial Science and Technology （ AIST ）

Fabrication service for Industry Bridge from Basic Study to Commercialization back National Institute of Advanced Industrial Science and Technology （ AIST ）

Micro Nano innovator education From Product to System, Product Based Learning National Institute of Advanced Industrial Science and Technology （ AIST ）

Wireless Networked MEMS “Animal Watch Project” Conventional ZigBee Chip 2.4 GHzRFLSI 8 bit micro computer Quartz 70% of Area is Passive components Minituarization of Passivecomponents （ Low Temperature Cofired Ceramic) Wafer Level CSP Power Management Unit Wireless Communication Solution by System in Package Smart Flea Encupsulation Sensing unit ＋ Power Management unit ＋ Communi- cation Unit Physical Sensors Wafer Level Packaging （ Sensors and Power is not installed ） National Institute of Advanced Industrial Science and Technology （ AIST ） Less than 5 mm2 distance ： 30 m 2.4 GHz -250 kbps Passive components Flexible film packaigng

Brain waves Blood pressure Wireless measurements at Home Continuous monitoring (ex. every morning) Electrocardiogram Monitoring of Human Conditions (esp. sleep) Present: Measurements at Hospital not frequently inconvenient National Institute of Advanced Industrial Science and Technology （ AIST ）

Green IT by MEMS Energy consumption by IT industry in Japan Senario2010 Electric Power consumption Electric Power consumption2020 Electric Power Consumption Electric Power Consumption NTT １ After Basic counter measure 45 B kWh ― MItsui 2 54 B kWh ― SCI 3 No counter measure 327 B kWh ― Mitsubishi 4 ― 66 B kWh 2,38 B kWh METI 5 ― 47 B kWh 87 B kWh Total energy consumption ： 約 980 B kWh （ 2005 ） Emission of CO2 by IT industry is more than 2% and comparable to that of Avian industry National Institute of Advanced Industrial Science and Technology （ AIST ）

Offic e Electrical energy consumption Networked Sensing of Energy consumption 21:22: :25: :40: :41: TimeNode ID ULP IDC ID C Micro ubiquitous power meter Building Energy Management systems （ BEMS ） Hom e Visualization of CO ２ emission Home Energy Management system （ HEMS ） back National Institute of Advanced Industrial Science and Technology （ AIST ）

Photonics Bio-chemical technology Electronics Storage Media Lenz array Photonic devices Optical guide Diffractionlattice Micro channel Reactor Bio-chip Mixer DVD HDD Magnetic memory memory Lithography （ 50nm ） Display Nanoimprint Low cost process for sub micron machining billion US$ （ 2010) National Institute of Advanced Industrial Science and Technology （ AIST ）

Nanoimprint R&D  Materials, especially glasses Materials, especially glasses Materials, especially glasses  Applications Applications Bio Bio Data storage Data storage Fuel cell Fuel cell 3D packaging 3D packaging  Large area Large area Large area  Inspection Inspection  Nm resolution Overlay Alignment Nm resolution Overlay Alignment Nm resolution Overlay Alignment National Institute of Advanced Industrial Science and Technology （ AIST ）

Bio applications of Nanoimprint Nano pillar for cell growth Osaka Pref. University Professor Hirai Cell growth National Institute of Advanced Industrial Science and Technology （ AIST ）

Prototype Structure of Nanoimprint Fuel Cell National Institute of Advanced Industrial Science and Technology （ AIST ）  -DMFC Si mold

substrate Si-substrate Start Polymer deposition Nanoimprint substrate Metallization Si-substrate substrate CMP Nanoimprinting Application for Packaging 戻り National Institute of Advanced Industrial Science and Technology （ AIST ）

For further large area of Nano patterning ー Roll type fabrication ー National Institute of Advanced Industrial Science and Technology （ AIST ） 戻り Max. temperature ： 250 ℃ Max. press force ： 10kN Scan speed ： 0.1mm/sec –10mm/sec Max. stamp size ： 300×500mm

Desktop Nanofactory Need Change Winner American Capital China Production TOP down Nanotech or MEMS approach Larger wafer Process Standard National Institute of Advanced Industrial Science and Technology （ AIST ）

Desktop Factories Ceramic heater back National Institute of Advanced Industrial Science and Technology （ AIST ）

For Commercialization   Networked MEMS Bio-technology applications ( uTAS, Artificial Organs) Security monitoring of Nature and Constructions   New process development for MEMS Forming and Nano-imprinting Miniature MEMS fabrication system   Education for Industry   Real obstacle for high technology venture company Japanese ethics and restriction (compliance, conflict of interest etc.) Mother heritage system National Institute of Advanced Industrial Science and Technology （ AIST ）