Nanotechnology Research Leo Lau Materials Science & Technology Research Centre The Chinese University of Hong Kong

Infrastructure Characterization – Variable temperature AFM/SPM Room temperature AFM/SPMs Scanning electron microscopes Transmission electron microscopes Scanning Auger electron microscope X-ray photoelectron spectrometer Ultraviolet photoelectron spectrometer High resolution electron energy loss spectrometer Raman spectrometers. Fourier transformed infrared spectrophotometers. X-ray fluorescence spectrometers Rutherford backscattering spectrometer Particle induced x-ray emission spectrometer.. Low energy ion scattering spectrometer

Fabrication –. Spin coaters UV/Ozone reactors Single/double face RF plasma cleaning systems Electron beam deposition units RF/DC/ECR plasma deposition systems Metalorganic vapour phase epitaxy reactors Magnetron-sputtering ion plating system Optical coatings deposition systems Laser welder Metal vapour vacuum arc ion source reactor. Low energy ion beam deposition reactor MeV ion implanter Infrastructure