Team Corrosion EE412 Week 4 Alex and Joey Mentor: J Provine

Ordered the Mask From Artnet Pro 100um CD Picked it up today

Ordered the Reference Electrodes Typical diameter = 12-20mm Bioanalytical Systems RE-6 = 6mm

System Components Counter electrode = Pt wire Reference electrode = Ag/AgCl Working electrode = test structure Poteniotstat = from Howe group (or 3 FET op-amps) = Biasing setup: Bias the working electrode relative to the reference electrode (counter supplies current) Measurement setup: 1)Leakage: measure DC CE-WE impedance 2)Resistance: bias resistor with GND = RE 3)Capacitance: Measure AC CE-WE impedance

Experiment Overview Variable factors – Test structure size (1mm, 2mm, 4mm, 8mm) – ALD thickness (5nm, 10nm, 20nm) and composition (Al 2 O 3, HfO 2, ZrO 2 ) – Time (1 hour, 24 hours) and bias (1V, 5V, 10V) Constant factors – Electrolyte pH (7.4), measurement temp (23C), deposition temp (200C) Measured responses – Capacitance (initial, change) – Leakage current (initial, change) – Resistor integrity Interactions – Structure size and film composition – Film composition and thickness – Time and bias

Design of Experiments Full factorial – 216 experiments – 112 straight days Screening design – 24 experiments – 13 days Issues – # of replicates – Time? Time*Bias?

A very non-DoE approach Experiment 1: Film composition and thickness – Full factorial: film composition, thickness – Constants: structure size (4mm), time (1 hour), bias (5V) Experiment 2: Structure size – Full factorial: structure size, film composition – Constants: thickness (10nm), time (1 hour), bias (5V) Experiment 3: Bias voltage – Full factorial: film composition, bias voltage – Constants: thickness (10nm), time (1 hour), size (4mm)

This Week Finish test wafers and cleave First ALD coatings Measurement setup and first data