Preshower PRR July NCSR DEMOKRITOS Production Center : Institute of Microelectronics (IMEL) Regional Center : Institute of Nuclear Physics (INP) Si Detector development for the Preshower in DEMOKRITOS is a joint activity between the two institutes initiated in 1997 Design by INP Fabrication by IMEL Module construction, quality control and test by INP

Preshower PRR July NCSR DEMOKRITOS short review Three versions tested 60 mm x 60mm preshower detector Ten wafers (4-inch) processed (1997) Good test structures but problematic preshower detectors

Preshower PRR July NCSR DEMOKRITOS short review 60mm x 60mm preshower detectors with n+ guard ring Fifteen wafers processed (1999) Good test structures, problematic preshower detectors

Preshower PRR July NCSR DEMOKRITOS short review Detectors from the 1999 batch Detector from the 1997 batch Both fabricated with a 3-inch mask aligner

Preshower PRR July NCSR DEMOKRITOS short review 63 mm x 63 mm detectors fabricated with a new 4-inch aligner (2000) Two batches (V,Z) of 10 detectors each one were processed Yield 50% A new batch of 15 detectors is currently in progress (june - july 2001)

Preshower PRR July NCSR DEMOKRITOS 2000 processing Sum of 32 strips 32 individual strips Detector on wafer without passivation

Preshower PRR July NCSR DEMOKRITOS 2000 processing Total leakage current for seven detectors : batch V, detectors on wafer without passivation (10 μA, 300 V) Detectors : V2,V3,V5, V8,V9,V10,V11

Preshower PRR July NCSR DEMOKRITOS 2000 processing Passivation: Low Temperature Oxidation ~ 0.3 μm SiO 2 Measurements for 5 detectors after passivation (4 detectors from batch V, 1 from batch Z) 3 detectors on wafer 2 off wafer One strip with irregular behavior excluded Detectors V1,V3,V9 V11, Z2

Preshower PRR July NCSR DEMOKRITOS 2000 processing

Preshower PRR July NCSR DEMOKRITOS 2000 processing Plasma etching during passivation poses problems

Preshower PRR July NCSR DEMOKRITOS 2000 processing

Preshower PRR July NCSR DEMOKRITOS 2000 processing

Preshower PRR July NCSR DEMOKRITOS: IMEL detector dicing Wafer saw machine : Micro Automation 602M Y1 Y2 X1X2 Dimensions measured with ~5 μm accuracy

Preshower PRR July μm to the p+ of the first strip μm to the other end of the detector Center of scribing line is 5 μm from detector edge Normally, during scribing, the center of the scribing saw will be placed here. The scribing tool is 50 μm thick. So, in average, an estimated detector width of μm is expected after dicing Eye NCSR DEMOKRITOS : IMEL detector dicing

Preshower PRR July NCSR DEMOKRITOS detector production plans

Preshower PRR July NCSR DEMOKRITOS :IMEL equipment Wet bench (3) cleaning of Si wafers Medium current ion implanter EATON NV-3206 ( keV) Low Pressure Chemical Vapor Deposition TEMPRESS 6-inch double side mask aligner (Carl Suss) Thermal processing equipment TEMPRESS

Preshower PRR July NCSR DEMOKRITOS :INP available space & equipment Space : 80 m 2 Temperature & humidity control (COMPTROL 4000: SULTZ) Prober : Carl Suss PA 150 enclosed on a light tight box CV : HP4092A IV : Keihley 6517 current meter & voltage source Pick and place system : FRITSCH

Preshower PRR July NCSR DEMOKRITOS :INP Preshower specific equipment 32 Switch board Probe card CRISTAL software installed and tested

Preshower PRR July NCSR DEMOKRITOS :INP μ-module assembly Work on μ-module assembly goes in parallel and in close collaboration with Dubna

Preshower PRR July NCSR DEMOKRITOS :INP μ-module assembly

Preshower PRR July NCSR DEMOKRITOS :INP μ-module assembly

Preshower PRR July NCSR DEMOKRITOS :INP CRISTAL data base CRISTAL initially installed in March 2000 Two machines running Win2K One machine with CRISTAL (Orbix, Objetivity and CRISTAL LC) acting as data base server and operator workstatio A second machine runs Labview and communicates with physical instruments VI’s modified for the local instruments ( Keithley 6517 and HP 4192A LF) Now the system runs with PRESHOWER_Config_v31.DB Barcode reader purchased in April 2001 Dummy barcodes printed by using a shareware program (Label Magic v1.1) and registered by CRISTAL Latest upgrade in CRISTAL (April 2001) permitted successful duplication of dummy data to the Central Storage at CERN

Preshower PRR July NCSR DEMOKRITOS :INP Conclusions Time per module for construction, quality control and testing : ~ 3 hours Man power for construction, quality control and testing : -two technicians for μ-module assembly -one person for μ-module testing Detectors : 1000 to be provided by the Greek groups and preferably fabricated in Greece (Institute of Microelectronics) alternative providers identified : ELMA Construction, QC and testing of 500 modules by the Preshower group of the INP