Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. The schematic of FBAW filters structure. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /

Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. The schematic of basic multilayer FBARs structure. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /

Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. The Mason equivalent circuit model of FBARs. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /

Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. Simulation results of 2.4-GHz FBAW filters. It contains S21 and S11 of third-order and fifth-order filters. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /

Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. Layout schematics of FBAW filters. (a) Third-order ladder type. (b) Fifth-order ladder type. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /

Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. The CMOS-compatible FBAW filters fabrication process. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /

Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. Scanning electron microscopy images of the accomplished FBAW filters. (a) The third-order FBAW filter and its enlarged cross- sectional view along section line. (b) The fifth-order FBAW filter and its enlarged cross-sectional view along section line. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /

Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. The quality of piezoelectric film layer AlN. (a) Cross-sectional view of structure. (b) X-ray diffraction diagram of structure. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /

Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. Measured S21 and S11 of accomplished third-order FBAW filters. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /

Date of download: 6/22/2016 Copyright © 2016 SPIE. All rights reserved. Measured S21 and S11 of accomplished third-order FBAW filters with matching circuits. The accomplished FBAW filter connecting with the components of a serial 3nH inductor and a serial 4pF capacitor in input/output terminals, simultaneously. Figure Legend: From: Development of 2.4-GHz film bulk acoustic wave filter for wireless communication J. Micro/Nanolith. MEMS MOEMS. 2009;8(2): doi: /