Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Illustration of optimum D-S combinations. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Schematic illustration of optical leak test. (a) initial MEMS package specimen under an atmospheric condition, (b) when the package is subjected to a leak test, cap surface topography deformed by a pressure differential is documented, and (c) reflatten cap surface at the end of the test. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Schematic illustration of Twyman Green interferometry and an interferogram (or fringe pattern). Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Illustration of FFT analysis: (a) Original fringe pattern, (b) modulated pattern with carrier fringes, (c) Fourier spectra, (d) phase map after inverse Fourier transform, and (e) 3-D plot. The cavity location is indicated by the dotted box. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. (a) Schematic illustration of test specimen (excerpted from Ref. ) and (b) mesh setup of the quarter-symmetry finite element model. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Schematic diagrams of (a) the experimental setup and (b) the arrangement for mitigation of optical noise. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. (a) Calibration curve [the encircled values correspond to the fringes in (b)] and (b) representative fringe patterns and 3-D deformation maps obtained during the calibration process (the units in the scale are microns). The cavity location is indicated by the dotted box. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Repeatability of the measurement; the data points are scattered around the average value (solid black line). Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. History of effective chip surface deflections and corresponding internal cavity pressure evolution during the bombing stages. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Typical gas diffusion simulation results of (a) gas pressure history and (b) gas pressure distributions inside the seal. Close circular dots in the graph correspond to distribution contours and numbers in parenthesis of contour plots indicate the cavity pressures. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Plot of R2 obtained from the initial sweeping. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Experimental data of the cavity pressure evolution during the bombing process are compared to numerical predictions using the best D-S combinations obtained from the inverse method Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Plot of R2 obtained from the third sweeping. Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /

Date of download: 6/29/2016 Copyright © 2016 SPIE. All rights reserved. Experimental data of the cavity pressure evolution during the pressure release using the three combinations of D-S values obtained from the third sweeping matrix (they are marked as dots in the matrix plot in Fig. ). Figure Legend: From: In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /