KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering Lecture V Thermal Processes

` KUKUM – SHRDC INSEP Training Program 2006 Thermal Processes in IC Fabrication School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Thermal Processes: Definition School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Introduction School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Introduction School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Diffusion Barrier School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Passivation Surface School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Screen Oxide School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Pad & Barrier Oxides in STI Process School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Pad Oxide School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Device Isolation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Blanket Field Oxide Isolation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – LOCOS School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – LOCOS Process School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Sacrificial Oxide School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Device Dielectric School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Application – Device Dielectric School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Mechanisms School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Mechanisms School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Oxide Growth Rate Regime School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Silicon Dry Oxidation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Wet (Steam) Oxidation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Silicon Wet Oxidation Rate School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Temperature School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Wafer Orientation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Wet Oxidation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Dopant Concentration School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation Rate: Differential Oxidation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation Process School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Dry Oxidation System School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Dry Oxidation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Gate Oxidation Steps I School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Gate Oxidation Steps II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Wet Oxidation Process School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Wet Oxidation Process Steps I School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Wet Oxidation Process Steps II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Rapid Thermal Oxidation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxide Measurement School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Oxidation: Summary School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Introduction School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping: Illustration School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping: Illustration School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping: Illustration School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process I School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps I School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps III School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps IV School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps V School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion Doping Process Steps VI School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Dopant Oxide Deposition School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Cap Oxidation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Drive-In School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Drive-In School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Strip Oxide School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Limitations & Applications School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Applications – Drive In School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Applications – Well Implantation & Drive In School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Applications – Boron USJ Formation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Diffusion: Applications – Boron USJ Formation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Post- Implantation Annealing I School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Post- Implantation Annealing II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Before Ion Implantation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 After Ion Implantation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 After Ion Implantation School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Thermal Annealing I School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Thermal Annealing II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Thermal Annealing II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Annealing: Summary I School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Annealing: Summary II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Annealing: Summary III School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Rapid Thermal Processes: Introduction School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Rapid Thermal Processes: Introduction School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 RTP Chamber School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Annealing & Dopant Diffusion I School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Annealing & Dopant Diffusion II School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Anneal Rate vs. Diffusion Rate School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Dopant Diffusion After Anneal School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 Advantages of RTP over Furnace School of Microelectronic Engineering

KUKUM – SHRDC INSEP Training Program 2006 RTP: Summary

KUKUM – SHRDC INSEP Training Program 2006 Thermal Processes: Summary School of Microelectronic Engineering