NEW CLEAN ROOM GUIDELINES AND SAFETY EHS: Campus Emergency: X99 (From a campus phone)

Columbia Nano Initiative (CNI) Shared Facilities Nava Ariel-Sternberg Director of CNI Facilities Chris Goulbourne Daniel Paley Nirit Porecki Shamay Clean Room and E-beam Lithography Electron Microscopy Materials Characterization James Vichiconti

Renovated and Expanded Clean Room  Approximately 5000 sqf of renovated space  Improved facilities (Nitrogen, Compressed air, NCCW, DI water)  New tools – RIE with Cl and F chemistries, Diffusion furnace, SEMs  New gases – NH 3, SiH 4,Cl, BCl 3 and more  New dress codes

General – Clean room  You may bring the following items into the clean room: lab glassware, approved chemicals, metal sources, clean room compatible paper, laptops, and materials targets.  Use only cleanroom paper. Cleanroom notebooks are available through the laboratory store.  All items must be wiped down prior to entering the Cleanroom.  Do Not hold the lab door or change room open.  Shared storage will be available inside the cleanroom.

General and Safety  Proper dressing to the clean room is required:  No shorts or skirts are allowed. Long pants must be worn at all times.  Leather or synthetic closed shoes are required. No sandals or flip-flops are allowed.  No extra garments or personal items are allowed in the Change Room or Cleanroom  Umbrellas  Jackets  Bags or Purses

Daily use Lockers  There are going to be ‘Daily use’ lockers in the lounge room.  You should remove your personal belongings at the end of the day. Locks will be cut if lockers will be misused.

Gowning Up  To Gown Up use:  Hair net (hair tied up in net) are necessary for users with long hair. The hair net will keep hair from spilling out of the hood.  Cleanroom coverall (aka bunny suit), hood, and cleanroom shoe covers.  The hood should be tucked in the coverall  The coverall should be tucked in the shoe covers.  Safety Glasses  Gloves - to prevent clean room contamination.

De-gowning  Do not allow your cleanroom garments to drag on the floor when you are de-gowning.  This will cause your garment to pick up particles and spread contamination to the cleanroom.  The hair net, and gloves are disposable.  Cleanroom coverall (aka bunny suit) and hood should be stored on a hanger with your name tag displayed.  Cleanroom shoe covers should be placed in the in-use shoe cover rack.  The Cleanroom staff will remove the garments weekly for cleaning.

Safety  No entry for unauthorized personnel in new clean room  New users will have to attend a clean room orientation (will be given monthly)  Safety training, as described on our website, is required in order to enter the clean room.  Environmental Health & Safety Training Class (TC0950)  Hydrofluoric Acid (HF) training (TC1650)  No eating or drinking is allowed in the cleanroom or gowning room areas.  When you first enter the clean room make sure you know where the emergency exits, safety showers and eye wash stations of the clean room are located.

Safety  The CNI Cleanroom is a nanofabrication facility that contains materials that are corrosive, toxic and/or flammable in nature. Safety is paramount.  In the event of an alarm or fire, exit the cleanroom immediately through the nearest exit. Do not take the time to de-gown.  Blue lights indicate hazardous gas event.  White lights indicate fire or smoke event.  Never attempt to handle, inspect, or clean up an unknown liquid spill.  Evacuate the lab  Inform the cleanroom staff  In case of an emergency call 4555, x99 from a campus phone, and/or 911 and notify the staff

Chemicals Policies  No unapproved chemicals or materials are allowed in the lab.  All chemicals must be approved by the clean room staff and have a MSDS in the clean room database. In order to get a chemical approved send us an with the relevant chemical MSDS.  All users must familiarize themselves with the relevant MSDS of the chemicals they need to use.  All approved factory chemical bottles brought into the Clean Room must have a Columbia Bar Code on the container with the Clean Room as the destination storage place.

Chemicals Policies  All chemical containers must be labeled  Chemical name (no formulas)  Your full name  “In Use date” ( The date the chemical first placed in service)  Your group (PI)  Chemicals with “In Use date” of one year or greater will be disposed.  All chemical containers must be self standing.  Do not leave unattended chemicals inside the hood for more than a day. You should notify cleanroom staff member if you need to do so.

Storage of Chemicals:  All chemicals must be stored in the appropriate storage containers  Do not store different classifications of chemicals in the same storage container:  Flammables cannot be stored together with Oxidizers  Acids cannot be stored with Bases

Working with Chemicals  Work with chemicals inside designated fume hoods only  Wear personal protective equipment: Apron, Face shield, Protective Gloves (on top of latex/nitrile gloves)  Pressure test gloves for holes prior to use.  Change gloves after each use.  Do not block the fume hood’s air holes including those on the work surface.  Keep chemicals separate. Do not introduce Solvents/Bases into Acid fume hood or Acids into solvent/bases fume hoods.  If you worked with dishes, rinse them in the sink and place them in the dish washer

Chemical Exposure - Eyes  Flush with water using eyewash, assistance from another cleanroom user is advised.  Time is critical when flushing chemicals from eyes, respond immediately and wash for at least 15 minutes  Seek medical care as soon as possible!  Keep others informed of your situation

Chemical Exposure - Skin  In the case of chemical exposure or suspected chemical exposure to skin, wash the area immediately for at least 15 minutes in the nearest faucet or eyewash  For larger exposures use safety shower.  If your clothing has been exposed, first take off clothes then use shower. Inform those around you or the cleanroom staff of your situation  Seek medical care as soon as possible!  It is important to remember that cleanroom suits, and head and shoe covers will not protect you from chemical spills

HF Exposure  HF exposure may not cause any sensations at first, yet can be fatal. Visible signs of HF exposure may not appear until the next day when its too late to treat  If not treated immediately, HF exposures may results in serious injuries  In the case of HF exposure:  1) Inform those around you of the exposure, inform the CR staff  2) Wash the exposed area with water for 15 minutes  3) Open HF Treatment Kit  4) Continuously apply generous amount of calcium gluconate cream to exposed area  5) Seek for medical help, have a friend inform the hospital of the situation. Take the laminated MSDS with you.  6) At the hospital, the doctor may inject calcium based solution into the affected area

Chemical Waste  Never hold containers by the cap. Hold chemical and chemical waste bottles with both hands using the handle.  Chemicals should not be poured into the drain. Waste chemicals are to be collected in designated containers for disposal. Remove funnels when done pouring waste. Waste bottles should never be filled above 2/3 of their volume.  The clean room will provide labeled waste containers (see next slide). These containers must be kept inside the designated cabinets.  Add only the compatible chemicals to the corresponding waste container.

Chemical Waste  If your chemical or chemical mixture is not one that has been provided, you will need to create your own label for a new container. This should be sent for waste disposal upon completion of use. Contact the clean room staff for questions.  NanoStrip, HF, and BOE cannot be collected in glass containers  Only cooled Piranha can be poured into waste bottles.  Under no circumstance should anyone modify a waste container label.  All waste containers must have a ‘CHEMICAL/HAZARDOUS WASTE FOR DISPOSAL’ label filled out at their origin

Disposal and Storage of Chemical Waste  Do not pour chemicals down the drain.  Rinse empty chemical containers out three times.  Mark rinsed containers with a 3X and place in the Chemical Waste bucket under the bench in the gowning area.

While Using Tools and Clean Room Equipment:  No use of cell phones while working in the clean room with two exceptions: in case of an emergency or to report equipment problems  Must wear gloves and safety glasses (microscope exception for glasses). Personal protective equipment should be worn when working with chemicals.  Do not adjust gas pressures on regulators  Do not leave equipment while in use  Do not modify equipment or attempt to fix tool problems by yourself  Do not bring in or move hot plates around.

While Using Tools and Equipment  Only use tools that you have been certified to use.  Cancel reservations you won’t be using in advance  Enable the desired tool in Badger prior to use.  Abide by the specific training guidelines for that tool, (If you are unsure, please ask).  If the tool has SOP, please follow it step by step. SOP does not replace training or certification.  Do not leave personal or group (PI) materials out on tables or by tools  Report all equipment problems through the Badger laboratory management system.  Record pertinent information in the Badger laboratory management system as necessary  Some tooling will have log sheet (electronic or otherwise). Record as necessary.  Remember to disable the tool in Badger when finished.

Lithography  All resist bottles are located and available in the refrigerator.  Label individual usage bottles with Your Name, resist name, and “In Use date”.  Clean photo resist spinners and chucks (with Acetone) after each use. Aluminum foil may be used.

Work Alone Policy  Normal hours of operation for the cleanroom are Monday through Friday between 7:00 am and 6:00 pm (unless closed for site holiday). After hours is 6:00pm- 7:00am and weekends.  There should be at least one observer in the lab who is aware of the wet chemistry work when it is happening. Additionally, a C14 qualified person must be present on the floor during the time of chemical handling.  Working alone is an acceptable practice providing the worker has been C14 qualified. It is recommended that workers who are alone in the lab have a cell phone on them and maintain regular contact with an individual who is outside of the laboratory.  During after hours a chemical work is allowed only with a buddy who is also a C14 holder.

Working with Others:  This is a shared workspace. Please be mindful and considerate of other users  Always leave tools in a pumped down standard operating status ready for the next user  Clean your materials, tools, chemicals, and equipment up when you are finished with your work.  Do not use other people’s or group’s glassware, tweezers, tools, chemicals, etc…..  If there’s a problem with the tool – let us know.

Badger  Each user should have its own Badger account. Students from the same lab cannot share passwords.  All New Users should provide full account form signed by their PI or Admin.  Users should stay in “enable” stage for the entire use session to prevent billing mistakes and issues.  If you accidently enabled the equipment and disable it immediately, you will be charged for the minimum charge. In order to avoid this unnecessary charge please send an to cleanroom staff and they will fix it.

1. Reports  Financial Details 2. Select the dates  Display 3. You’ll get a report with all your usage and the cost

Questions? Problems? Requests? Contact us!

Useful links  The NFPA diamond:   EHS library of MSDS, Columbia university:   CNI labs website: 