A New MSE Evaluation Method New Technology A New MSE Evaluation Method

This technology can visualize strength of materials at nano-level. Even for samples which can not be evaluated so far… The World's First Method

Demands from fields of advanced technology Layered thin film Semiconductor LC・LED Demands from fields of Advanced Technologies Cut・Grind organic thin film Fuel Cell・Solar cell Demands from fields of advanced　technology

If you need to know the surface strength of materials and thin films... If you need to know the surface Indentation Test Peeling Test Bending Test Tribology Test 　I can not evaluate the strength But… 　of nano-size smaples…

However, with the new MSE Method

Important Erosion by nano-size particle will evaluate the strength of materials Measurement of eroded surface Erosion Wear Strength can be evaluated by repeating this procedure.

Erosion by nano-size particle This method will wear AVE. 1.2μm nano-size Alumina particle Nozzle This method will wear the surface at nano-level High speed collision of slurry(particles and water) by nano-size particle

Erosion Profiling zoom Result Precise control by a small nozzle Evaluation of material strength with nano-particle erosion

Progress of wear Profile Superposition

ＤＬＣ Test result Visualized graph of measurement result I can see the slope! Plotting the depth Strength of base material Strength of coating ＤＬＣ Test result Thickness of coating

How to use the ＭＳＥ? MSEは卓上装置

The ＭＳＥ tester Usage method

Parts of the tester Control panel Collision box Slurry pot table

Setting slurry pot Mix MSE nano-particle with water in the slurry pot. Set the slurry pot on the pot table. Mix MSE nano-particle with water in the slurry pot.

Set a sample on the sample arm. Setting a sample Adjust the height. Set a sample on the sample arm. Sample Sample table 試験片を台にセットして

ＭＳＥ erosion treatment Automatic controlled collision Nozzle 装置で処理 Automatic controlled collision under the set condition.

Profiling measurement Profilometer Profile

Repeat measurements Specify the wear depth! Wear Depth (μm) Profile Superposition

Wear curve Base Coating Interface Wear Depth （µm） Collided particle amount　（g）

Wear rate curve Interface Base Coating Wear Rate （µm/g） Wear Depth　（µm）

What can be measured?

the strength of thin film itself. ①This can measure the strength of thin film itself. ＤＬＣ Wear Graph Film thickness 420nm Film thickness 380nm Film thickness 300nm

This can measure the strength from the surface to deeper areas continuously. Chemical coating Wear graph Base Chemical coating Surface coating

This can measure the strength from the surface to deeper areas continuously. 500 400 300 200 100 600 700 Lens of glasses Base Hard coating Ground Optical functional coating

This can measure the film thickness based on strength. TiN(2.8µm) TiC(0.6µm) W　C For example, TiN multi-layers like this・・・

This can measure the film thickness based on strength. Wear graph W　C TiC(0.6µm) TiN(2.8µm) You can see the coating point of strength You can know the film thickness! TiN W　C TiC

This can measure the film thickness based on strength You can know the distribution of strength in depth direction With the distribution graph of wear rate Wear distribution TiN （Coating） TiC （Coating） W　C （Base） TiN W　C TiC

the strength of interface This can measure the strength of interface Wear rate contribution

Comparison with the mass content This can measure the strength of interface Wear rate contribution Correlation between the strength distribution and mass content Co 1 2 3 4 5 20 40 60 80 100 Wear Depth (μm) Mass content 　% Ti N W C O Elemental analysis result Comparison with the mass content

Contribution to manufacturing

Evaluation of sliding surface Contribution to development of coating technologies and quality control on abrasion surface Evaluation of sliding surface Contribution to manufacturing 　－ＭＳＥ－

Evaluation of cutting tools Contribution to development of coating technologies and quality control on abrasion surfaces Evaluation of cutting tools Contribution to manufacturing 　－ＭＳＥ－

Evaluation of ＤＬＣ coating Technical development and quality control of super hard coating Evaluation of ＤＬＣ coating Contribution to manufacturing 　－ＭＳＥ－

Evaluation of ＣＶＤ Diamond Technical development and quality control of super hard coating Evaluation of ＣＶＤ Diamond Contribution to manufacturing 　－ＭＳＥ－

Evaluation of LC oriented coating Technical development and quality control of super thin film coating Evaluation of LC oriented coating Contribution to manufacturing 　－ＭＳＥ－

Evaluation of automotive parts Technical development and quality control of gradient coatings Evaluation of automotive parts Contribution to manufacturing 　－ＭＳＥ－

optical functional coating Technical development and quality control of gradient coatings Evaluation of optical functional coating Contribution to manufacturing 　－ＭＳＥ－

Evaluation of coatings Technical development and quality control of hard and thin coating on plastics. Evaluation of coatings for touch screen Contribution to manufacturing 　－ＭＳＥ－

Evaluation of coating on lens of glasses Technical development and quality control of hard and thin coating on plastics. Evaluation of coating on lens of glasses Contribution to manufacturing 　－ＭＳＥ－

Visualization will Visualization will create innovation. create innovation.

could not measure so far. parameters which you You can now measure could not measure so far.

For unmeasurable surfaces Too hard surface For unmeasurable surfaces Too thin surface Too soft surface

Nano-particle erosion opened this new way for evaluation!

The MSE Method

Innovation will come! Save the energy Downsizing Save the resources

The MSE Method

Palmeso co., ltd. 株式会社パルメソ

ＭＳＥ Tester MSE-A MSE-S 株式会社パルメソ Palmeso co., ltd. Full Automatic Type High Precision Type Customization can be done to meet your application. MSE-A Full Automatic Type Palmeso co., ltd. 株式会社パルメソ