Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Schematic of abrasion test rig for felt abrasion test

Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Schematic of the silica-based ARC for (a) 1L and (b) 3L

Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Performance indicators as a function of annealing time and temperature for (top) the 1L and (bottom) the 3L films

Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Top surface scanning electron micrographs of the films: (a) 1L and (b) 3L. Green, red, and yellow conditions are shown from top to bottom (see online figure for color).

Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Cross-sectional transmission electron micrographs of the films (top) 1L and (bottom) 3L. Green, red, and yellow conditions are shown from left to right (see online figure for color).

Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Simultaneous DSC/TGA and mass spec analysis during annealing of single-layer TMOS-NP-base gel film

Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Mechanical properties of 1L and 3L. Line plot against right y-axis on hardness chart shows the coating thickness.

Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Crack resistance depicted as critical load for cracking under indentation and fracture toughness

Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Scratch resistance depicted using (top) critical loads (LC1) and delamination resistance depicted using (bottom) work of adhesion

Date of download: 9/19/2016 Copyright © ASME. All rights reserved. From: A Multilayer Strategy for Improving the Abrasion Resistance of Silica Nanoparticle-Based Motheye Antireflective Coatings on Glass J. Micro Nano-Manuf. 2016;4(3):031005-031005-10. doi:10.1115/1.4033861 Figure Legend: Spallation resistance depicted using strain energy release rate