A new piezodriven precision micropositioning stage utilizing flexure hinges 班級：奈米四乙 學號： 4A 姓名：李懋靖 任課老師 : 朱志良 Paper 報告：平行桿

Figure 1. The schematic mechanism of the x–y precision micropositioning stage.

Figure 2. A schematic drawing of a flexure hinge.

Figure 3. A schematic demonstration of the output gain of the stage.

Figure 4. The output characteristic with consideration of compression and extension deformations of the flexure hinges.

Figure 6. A schematic drawing for the experimental setup.

Figure 7. The displacement versus the applied voltage for the stage in dual directions: (a) x direction, (b) y direction.

Figure 8. Time history of the stage for micropositioning test: (a) x direction, (b) y direction.

Figure 9. Frequency response of the stage: (a) x direction, (b) y direction.

Thanks for your attention !!