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Module 1: Safety Module 1: Safety This section describes maintenance of the following systems: SBD100 (Slurry Blend & Delivery System) Lift Station Host & Remote

Safety Rules Before operating any Mega Fluid Systems, Inc. equipment, follow these safety rules: Safety Rules Maintain compliance with all local, state, and federal regulations, ordinances, laws, etc., that require handling all processing solutions, chemicals, and acids, as well as all wastes produced by this system. All personnel must have proper training in related safety procedures. Do not allow unauthorized or untrained personnel in the area of the system. Personal Protective Equipment (PPE) is required. Follow requirements listed in the MSDS for the appropriate chemical. Follow all site specific rules for PPE. Treat all chemical exposures as potentially serious. Neutralize and irrigate the exposed area and seek first aid immediately as outlined in the MSDS. Use extreme caution when working with electrical equipment. Always assume high voltage exists; use lockout and tagout procedures during maintenance. Treat all chemical spills or leaks as hazardous and clean up immediately.

Safety Features Emergency Machine Off (EMO) Door Interlocks The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the tool. Safety Features Door Interlocks Opening an interlocked door triggers an alarm (unless the interlock bypass is activated) To prevent disrupting chemical/slurry dispense, bypass interlocked doors before opening (as needed; return to normal operating mode as soon as possible) Leak Detectors Stops the tool and activates a critical alarm

Safety Hazards & Symbols Pay attention to system labeling! Safety Hazards & Symbols DANGER Pick one (until you’ve picked all 3) WARNING CAUTION

Safety Hazards & Symbols Pay attention to system labeling! Safety Hazards & Symbols DANGER DANGER indicates a hazardous situation which, if not avoided, WILL result in death or serious injury. WARNING CAUTION

Safety Hazards & Symbols Pay attention to system labeling! Safety Hazards & Symbols DANGER WARNING indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. WARNING CAUTION

Safety Hazards & Symbols Pay attention to system labeling! Safety Hazards & Symbols DANGER CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injuries. WARNING CAUTION

Lockout/Tagout Bleed off the pressure or flush all lines carrying hazardous chemicals. Turn off or return all operating controls to the neutral mode. Relieve, disconnect, restrain, or otherwise render safe residual or stored energy such as capacitors, gas, steam, water pressure, air, and hydraulic. Lockout/Tagout Place the AC Disconnect switch in the Off position. Place and lock a padlock on the disconnect switch. Attach a lockout tag to the switch which indicates the system is locked out for service purposes and identifies those employees authorized to remove the lock and tag. Test the valve or switch to ensure the control cannot be moved to the activated position. Ensure all energy sources have been de-energized on dual or multi-energy source operations prior to beginning work. Re-test the controls of the individual machine or equipment to verify the operation is positively off.

EMO button must be accessible! Emergency Off (EMO) The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the tool. CAUTION EMO button must be accessible! Never disable or cover an EMO button. This can prevent the system from being stopped in the event of an emergency. Emergency Off (EMO) Pressing the EMO button is not a safe alternative to the prescribed lockout/tagout procedure.

Key Failure Points Changing out an empty supply drum/tote The following procedures (but not limited to) may place you at risk of chemical exposure: Changing out an empty supply drum/tote Sampling system chemical Flushing the system Checking for leaks Performing a particle count Transporting chemicals to the system Filling the pipes with air Changing pumps, valves, filters, pressure switches, etc. Handling PPE after use Key Failure Points

Spill Mitigation Mega systems are designed to minimize the possibility of an unwanted chemical release. The cabinet is designed to contain 110% of the total piping volume plus the total contents of the largest reservoir. If a spill should happen: Treat all chemical spills as extremely hazardous. Notify the proper site authority. Follow all site specific rules for chemical spills. Follow all information contained in the MSDS. If possible, contain the spill with absorbent barriers. If possible, neutralize the spill according to the MSDS. Spill Mitigation

Module 2: Alarms Module 2: Alarms

Alarm Types Alarms are activated when a system interlock is tripped. There are three levels of alarms: CRITICAL alarms are activated by urgent situations that require immediate attention and threaten the performance of the system. A critical alarm sounds the audible annunciator and shuts down the system. A chemical system shutdown (CSS) critical alarm stops the distribution pumping. Alarm Types PROCESS alarms are activated by situations that require immediate attention, but do not threaten the performance of the system. An audible annunciator is sounded and the sequence of actions are paused. Process Alarms shut down the affected station. WARNING alarms are activated by situations that do not threaten the performance of the system. These situations do not require immediate attention, but must be fixed before the situation escalates into a situation that could threaten the performance of the system. A warning alarm sounds the audible annunciator.

Responding to Alarms To silence the alarm, press the Alarms function button to open the System Alarm Summary screen.. Press the Silence button to silence the alarms. Press the scroll bar to move through the alarm list. Acknowledge the alarm(s) by pressing Ack All Alarms. Read the alarm message(s) and correct the problem. If the problem still exists, the alarm remains active and is written back to the list. Once the problem has been corrected, press the Reset button and all inactive alarms will be removed from the list. Responding to Alarms

Monitor System in Alarm Override mode! Overriding Alarms The alarm override disables all or some alarms. Overriding alarms is not recommended for normal operation. Use the alarm override to perform certain maintenance functions that would normally trigger an interlock, such as rinsing spilled chemical in the cabinet to the drain. Use caution with the alarm override; it overrides all system alarms. For example, if the override is activated to bypass a faulty sensor, a concurrent leak or pressure alarm is also overridden. Overriding Alarms CAUTION Monitor System in Alarm Override mode! Alarms do not function in alarm override mode. Potential hazards may be created. Use caution. WARNING Chemical Hazard! Alarm override may cause conditions that expose the operator to chemicals. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls if exposed to chemicals. Refer to the site MSDS for chemical-specific information.

Overriding Alarms, continued You must have the correct login credentials to override alarms. Door Bypass Press the Maintenance button to display the Maintenance screen. Press the Enabled/Disabled toggle to enable or disable alarms. Overriding Alarms

Module 3: Maintenance Module 3: Maintenance

Component Description Valves Swagelok Relief Valve Component Description GEMU 3-Way Automatic Valve SMC 2-Way Finger Valve GEMU 2-Way Automatic Valve Parker Check Valve GEMU 2-Way Manual Valve Parker Needle Valve

Component Description, continued Electronic Flowmeter Electronic Flowmeter Using a nonmetallic pressure sensing technology, the electronic flowmeter uses differential pressure to provide an accurate and reliable flow and pressure measurement. Flow and pressure measurements are not affected by bubbles or trapped vapor. Component Description Pressure Transducer Pressure Transducer Measuring line pressure allows for obtaining valuable and critical diagnostic information, which is used for monitoring or controlling process conditions such as DI water and chemical dispense.

Component Description, continued Reducing Regulators Reducing regulators control the incoming pressure to an exact pressure no matter what happens to the incoming pressure. The regulator design is based on a diaphragm and needle through a hole principle. The diaphragm moves to compensate for any changes in incoming N2 pressure. Component Description Pressure Switches Pressure switches notify the PLC when conditions meet or do not meet specifications and are associated with alarm conditions. The digital pressure switch is generally used for communicating the system pressure (psi) and two pressure switch outputs. Setpoints are adjustable from the front panel keys.

Component Description, continued Tanks Component Description Tanks are used to blend and distribute slurry to the Local /Global Loops. Different sized tanks are used to blend and distribute slurry, chemicals, or UPW (Ultra Pure Water).

Component Description, continued Level Sensors Liquid Level Sensor Ultrasonic Level Sensor Component Description Able to read and monitor the liquids levels through clear tubing (transparent). An ultrasonic sound wave is pulsed two times per second from the base of the Transducer. The sound wave reflects against the process medium below and returns to the transducer. The micro-processor based electronics measure the time of flight between the sound generation and receipt, and translates this figure into the distance between the transmitter and process medium below. . Omron Level Sensor Able to read and monitor the liquids levels through the walls of the tank (not transparent).

Setting Timers & Setpoints System Timers System timers are set from the Timer Setpoints screen. Timer values should only be changed with permission. Log in with the appropriate Maintenance credentials. Press the Maintenance button to access the Maintenance screen. Press the Setpoints button. The Setpoints screen displays. Setting Timers/Setpoints Select the appropriate timer to access the setpoints. Change the New setpoint value and press Enter.

Setting Timers & Setpoints, continued Alarm Setpoints Alarm Setpoints are set from the Alarm Setpoints screens. Alarm setpoint values should only be changed with permission. Log in with the appropriate Maintenance credentials. Press the Maintenance button to access the Maintenance screen. Press the Alarm Setup button. The Alarm Configuration screen displays. Setting Timers/Setpoints Press the appropriate Alarm type button to access the alarm list. Select the alarm to change Change the Alarm Type, if necessary.

Preventive Maintenance Why is Preventive Maintenance Important? Effective Preventive Maintenance (PM) maintains the system in optimal working order and ensures that the warranty extends to the equipment. Preventive maintenance also helps prevent unexpected downtime and disruption of the blend and distribution system. Preventive Maintenance What Should I Consider Before? Before performing system preventive maintenance: Follow site specific procedures for notifying affected personnel before performing preventive maintenance. Review all site requirements and procedures, including spill procedures, buddy systems, and PPE. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Review site MSDS for each chemical used in the system. Review all appropriate maintenance procedures. Ensure all equipment is available, work permits are approved, and all affected personnel have been notified. Before replacing any components, ensure the components are on hand.

Verifying Device Settings Obtain the latest device settings list for the system. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Locate each device on the Device Settings List, and compare the actual setting with the recorded setting. Use the P&ID to aid in locating each device. Record all deviations from the previously recorded settings on the Device Settings Record Sheet. Consult with the Process Engineer to verify that deviations require correction. Correct deviations, as required. Verifying Device Settings

Humidifier Settings A humidifier is essential to prevent slurry from drying on the sides of the tanks. Malfunction can occur for several reasons: The air pressure is too high or too low to create the mist. The mist pad is clogged and the pad does not work correctly. The drain is clogged. Humidifier Settings The water pressure is too high or low to create the proper mist. The water pressure is too high and the water sheets down the walls creating no mist (the mixture goes down the drain).

Humidifier Settings, continued Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Visually verify the humidifier is operating correctly. The water droplets should accumulate on the humidifier walls. There should be a minimal flow of water through the humidifier drain. If the humidifier requires adjustments adjust the humidifier CDA/ N2 and DI water pressure. CDA/ N2 pressure should always be greater than water pressure. To measure the DI water flow rate, shut off the CDA/ N2 supply and measure the volume of water draining from the humidifier drain line. The flow rate should be approximately 15 ml/min. Humidifier Settings

WARNING Cleaning Strainers Chemical Hazard! Strainers catch large particles being pumped through systems. Cleaning Strainers WARNING Chemical Hazard! Full-strength or diluted slurry may be contained in the Y-leg of the strainer. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information.

Cleaning Strainers, continued Perform a flush/purge. See Flush/Purge for instructions. Shut down the system to clean out the strainers. Verify the line is depressurized. Residual pressure could remain in the lines from the flush/purge. Close the strainer isolation valves to isolate strainer. Lockout/tagout the isolation valves. Place a chemical resistant container beneath the strainer to catch any slurry in the trap. As much as 50 CCs may be present. Unscrew the strainer cap. Remove the strainer cap and mesh. Rinse the strainer mesh and cap with DI water. Use a chemically compatible container to capture the waste. Dispose of the residue in the container according to all site procedures and MSDS requirements. Replace the strainer cap and mesh. Screw the strainer cap on. Remove the lockout/tagout devices. Cleaning Strainers

Checking Pump Operation If the doors must be opened, wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Ensure the pump is operating. Record the pump operating pressure on the Preventive Maintenance List. Force a pump switchover for redundant pumps by closing the manual valve downstream of the pressure switch. Ensure that pump 1 faults and pump 2 begins operation. Reset the pump fault alarm. Ensure the pump is correctly set online or offline. Typically, all pumps are online. Schedule maintenance for pumps that are not ready for operation. Record the pump runtime from the Timers Setpoint screen. If the pump value exceeds the maintenance setpoint, verify the date of the last maintenance completed. If the last maintenance was recent, ensure that the runtime was reset. If the run timer was not reset, consult a supervisor and reset the run timer upon approval Checking Pump Operation BPS-600 ARO ½” Diaphragm Pump

Checking Leak Detectors WARNING Chemical Hazard! Leak detectors are placed at the most likely spot to sense leaks. Chemical may be present. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information. The leak detector LED should be green, indicating no leak. The corresponding input LED on the PLC should also be lit. Spray a small amount of water on the leak detector with the hand sprayer. The LED should change to red, indicating a leak. The corresponding input LED on the PLC should turn off. If the sensor does not change, test the wiring with another leak detector. If the replacement sensor functions, the first sensor was faulty. If the replacement sensor does not function, check leak detector wiring. Replace the leak detector or repair the wiring, if required. Checking Leak Detectors

Adjusting the Ultrasonic Level Detector The ultrasonic level transmitter provides non-contact level measurement up to 18 feet (5.4 meters), and is ideally suited for challenging corrosive, slurry, or waste liquids. The transmitter is typically used for atmospheric bulk storage, day tank, and waste sump applications located within a classified hazardous area. The ultrasonic level transmitter is preset to measure in inches. Follow these steps to change the unit to display centimeters. Remove power to the transmitter and wait 10 seconds. Press [▲] and [Set] simultaneously while powering up the transmitter. The transmitter now reads in centimeters. To change the transmitter to display inches: Press [▼] and [Set] simultaneously while powering up the transmitter. The transmitter now reads in inches. Ultrasonic Level Detector

Checking and Replacing Fittings Checking Fittings Flared and threaded fittings can loosen due to system vibrations. Teflon fittings should be hand-tightened to prevent the development of leaks. Stainless steel fittings should be checked with a NO-GO gap gauge. Inspecting the fittings requires opening the cabinet doors. Take the proper precautions to avoid chemical and electrical hazards. Place the system in Manual mode and open all drain fittings to relieve all pressure from the chemical lines before replacing fittings. WARNING Electrical Hazard – Type 3! Risk of exposure to hazardous electrical current. Use extreme caution during preventive maintenance procedures to avoid accidental contact with energized parts. Checking Fittings CAUTION Pressure Hazard! Relieve pressure in lines before loosening and replacing fittings.

Checking and Replacing Fittings Checking Fittings, continued Ensure all fittings are tight. Loose plastic fittings should be hand-tightened. Stainless steel fittings should be checked with a NO-GO gap gauge. If the fitting leaks after it is tightened, replace it. Avoid over-tightening fittings! Over-tightening fittings may strip the fitting threads. Place the system in Automatic operation and check for leaks. Checking Fittings

Checking and Replacing Fittings, continued Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Place the system into Manual operating mode. Flush and purge the pipes in the area of the repair. Vent the line pressure by opening valves to the drain or exhaust. Close the closest isolation valves in order to isolate the fitting. Lockout/tagout the isolation valves. Remove the leaking fitting and the necessary plumbing. Replace the leaking fitting and install removed plumbing. Remove the lockout/tagout devices. Open the isolation valves. In Manual mode, fill the repaired area with liquid (or gas) and check for leaks. If the fitting leaks, ensure the fitting is tight. If the fitting still leaks, return to Step 3. Checking Fittings

Cabinet Cleaning Clean the cabinet after all other PM procedures are completed. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Rinse all chemical residue from the cabinet interior using the hand sprayers or wipes saturated in 10% IPA solution. Thoroughly dry the cabinet interior. Wipe the cabinet exterior clean. Dispose of all wipes according to site requirements and MSDS recommendations. Cabinet Cleaning