Introducing RG2 series encoders Renishaw plc 02/12/2017 Introducing RG2 series encoders 20 µm-pitch scale system Range of readhead sizes for a wide variety of applications Ultra-high vacuum (UHV) compatibility Strong reputation built over decades of faultless service Please read the notes below: Renishaw’s first encoder range entered the market 20 years ago. Confidential

Value Value to you Renishaw plc 02/12/2017 Proven reliability Easy set-up Versatile Value High speed Robust Please read the notes below: Proven reliability: 20 years of faultless operations across industry. Versatile: Suitable for a range of applications including ultra-high vacuum (UHV) and those requiring minimum system sizes. Robust: Strong metal readhead bodies with IP50 and IP40 sealing. Range of stainless-steel spar and tapes available. High speed: Allows faster processes and higher throughput. Easy set-up: Set-up and calibration procedures designed to streamline production-line installation and subsequent servicing. Confidential

Renishaw plc 02/12/2017 Specifications Vacuum compatible readhead variant (RGH20F and RGH25F only) Both 20 µm-pitch linear and rotary scales available Compact readhead sizes as small as 36 mm x 13.5 mm x 10.5 mm Linear resolutions to 5 nm and linear speeds to over 5 m/s Rotary angular speeds to 2940 RPM (RGH20) Choose either analogue or digital outputs Linear system accuracy greater than 1.5 µm/m Rotary system accuracy to ±0.5 arc second LED indicators for easy set-up and calibration Please read the notes below: Minimum RG2 encoder readhead size is for RGH20F and RGH25F (UHV) variants = 36 mm x 13.5 mm x 10.5 mm (length x width x height). If additional specs are required, refer to the relevant data sheet. These are the headline features and are considered appropriate for this type of introductory presentation. Confidential

Real-life applications Renishaw plc 02/12/2017 Real-life applications Taiwan’s UMA Technolgy Inc develops optical testing equipment to ensure smartphone camera lens quality UMA selected RGH22 encoders with RGS-20 tape for a screw- driven X-Y mobile platform for lens positioning to improve the accuracy and precision of an existing motion stage “ The mobile platform is one of the core components of the testing equipment. Prior to redesign, the linear stage was driven by only stepper motors, offering an unsatisfactory level of repeatability. Installation of Renishaw’s RGH22 encoder system has enhanced resolution to 0.1µm, which improves our product competiveness “ Please read the notes below: Please use link below for further details (paste following into browser): http://www.renishaw.com/encodercasestudies Confidential

RG2 basic principles Readhead sensor uses patented filtering optics Renishaw plc 02/12/2017 RG2 basic principles Readhead sensor uses patented filtering optics RS422 digital output or 1 Vpp direct from readhead OR Manual reference mark phasing. REE interpolator and REF interface use advanced algorithms to allow easy calibration For higher performance applications, the REF interface and REE interpolator allow access to higher resolutions and reduced SDE Please read the notes below: Within the readhead, an infra-red LED emits light laterally onto a scale with reflective and non-reflective areas. The light is directed back off the reflective areas through a transparent phase grating. This produces sinusoidal interference fringes at the detection plane within the readhead. The optical scheme averages the contributions from many scale graduations and effectively filters out signals not matching the scale period. This ensures signal stability even when the scale is contaminated or slightly damaged. Low short-term errors are assured by the unique optical design, typically giving less than ±0.15 μm Sub-Divisional Error (SDE). For even lower SDE and even higher signal stability, RG2 series encoders can be connected to either a REE or REE interface where appropriate. These utilise built-in Auto Gain Control (AGC) and Auto Offset Control (AOC) functions that operate at all speeds. The RG2 series readheads feature a set-up LED, which lights green when optimum installation has been achieved. A reference mark or a single limit is also available. The reference mark provides a repeatable home or zero position, whilst the limit is used as an end of travel indicator. ** Slide animates the scale and output waveforms together – the presenter should allow several seconds for this to run** Confidential

RG2 readhead options Readhead size: 36 x 13.5 x 14.8 mm Renishaw plc 02/12/2017 RG2 readhead options RGH20 Readhead size: 36 x 13.5 x 14.8 mm Linear speed to 8 m/s Resolutions to 10 nm 0 °C – 55 °C RGH20F Super compact readhead: 36 x 13.5 x 10.5 mm REF interface with DSP as standard Low SDE < ± 50 nm and resolutions to 5 nm UHV variant available 0 °C – 55 °C Please read the notes below: The RGH20 compact readhead offers reliable, high speed, open, non-contact performance with excellent immunity to dust, scratches and light oils on the scale. The RGH20 also benefits from Renishaw's integral readhead set-up LED which simplifies installation and monitors signal condition during operation. The RGH20F compact readhead offers reliable, high speed, open, non-contact performance with excellent immunity to dust, scratches and light oils on the scale. The RGH20F readhead is used with the REF interface, which incorporates automatic gain control and unique self-tuning adaptive electronics. Combined with the readhead's filtering optics, these ensure excellent signal integrity and low Sub-Divisional Error (SDE). The REF interfaces are available with high resolution digital outputs or with industry standard 1 Vpp analogue output. Confidential

RG2 readhead options Readhead size: 44 x 27 x 16 mm Renishaw plc 02/12/2017 RG2 readhead options RGH22 Readhead size: 44 x 27 x 16 mm Digital RS422 output direct from head Optional REE interpolator Speeds to 10 m/s and resolutions to 50 nm 0 °C – 55 °C RGH24 Readhead size: 36 x 13.5 x 14.8 mm Digital RS422 output direct from head Optional REE interpolator Speeds to 8 m/s and resolutions to 10 nm 0 °C – 55 °C Please read the notes below: The RGH22 readhead offers reliable, high speed, open, non-contact performance with excellent immunity to dust, scratches and light oils on the scale. The RGH22 also benefits from Renishaw's integral readhead set-up LED which simplifies installation and monitors signal condition during operation. The RGH24 is a compact readhead with integral interpolation which offers industry standard digital and analogue outputs. Its non-contact design offers high speed, reliable operation with zero friction and zero wear. Confidential

RG2 readhead options Ultra-high vacuum compatible Renishaw plc 02/12/2017 RG2 readhead options RGH25F Ultra-high vacuum compatible Super compact readhead: 36 x 13.5 x 10.5 mm REF interface Low SDE < ± 50 nm and resolutions to 5 nm UHV variant available 0 °C – 55 °C Please read the notes below: The RGH25F compact readhead offers reliable, high speed, open, non-contact performance with excellent immunity to dust, scratches and light oils on the scale. The RGH25F readhead is used with the REF interface which incorporates automatic gain control and unique self-tuning adaptive electronics. Combined with filtering optics, these ensure excellent signal integrity and low Sub-Divisional Error (SDE). The REF interfaces are available with high resolution digital outputs or with industry standard 1 Vpp analogue output. Confidential

RG2 linear scales Lengths > 50 m Thermally masters to the substrate Renishaw plc 02/12/2017 RG2 linear scales RGS tape (RGH 22, 24, 25 and 25F) Lengths > 50 m Thermally masters to the substrate ±15 µm / m accuracy at 20 °C Repeatable reference mark with magnetic actuator Adhesive mounting RSLR spar (RGH20 and 20F only) Lengths to 5 m ±4 µm accuracy over 5 m at 20 °C Magnetically actuated reference mark Mounting by adhesive or clips / clamps Please read the notes below: RGS20 is a ribbon scale manufactured from a thin flexible steel strip, featuring a 20 µm pitch, which is gold plated to give high reflectivity and corrosion resistance. It may be mounted using adhesive backing tape, to most engineering materials, including metals, ceramics and composites. Secured to the substrate with scale end-clamps, RGS is mastered to the substrate and will match the substrate's thermal expansion. The scale is supplied on a reel and can be cut to suit any axis length up to 50 m. RSLR is a stainless steel spar scale featuring 20 µm pitch, which is comparable to fine pitch glass scales and offers a total accuracy (including slope and linearity) better than ±4 µm over a 5 m length. It can also be coiled for simple storage and handling yet once uncoiled behaves as a spar scale. System designers can choose between specially formulated adhesive tape or mechanical clips to suit mounting requirements. Both mounting methods allow for independent thermal expansion to that of the substrate. Confidential

RG2 rotary scale Low profile scales with standard sizes up to Ø550 mm Renishaw plc 02/12/2017 RG2 rotary scale RESR ring (RGH20/RGH20F only) Low profile scales with standard sizes up to Ø550 mm Uni-directionally repeatable reference marks with magnetic actuator Graduation accuracy to ±0.5 arc second (Ø550 ring) Patented taper mount simplifies integration and eliminates installation errors Please read the notes below: RESR is a one-piece stainless steel ring with 20 µm pitch graduations marked directly on the periphery. Two versions are available in a wide range of sizes (Ø52 mm to Ø550 mm).‘A' section rings, which offer an impressive installed accuracy, feature a taper mount system which reduce the need for highly-toleranced machined parts and eliminate eccentricity. ‘B' section thin rings, which are low inertia and mass, are also available. Both 'A' and 'B' section rings have a large internal diameter for flexible integration. The non-contact format eliminates backlash, shaft wind-up (torsion) and other mechanical hysteresis errors that are inherent in traditional enclosed encoders. Confidential

Any questions? The RG2 Solution Proven track-record over many years Renishaw plc 02/12/2017 The RG2 Solution Proven track-record over many years Wide-variety of readhead variants to suit many applications 20 µm-pitch linear and rotary scales Ultra-high vacuum capability Easy set-up and calibration REE and REF interfaces for enhanced performance Any questions? Please read the notes below: Any questions? slide Feel free to amend for your individual presentation; this should summarise your main points (no more than 5-6 total) Confidential