Figure 1Fabrication of micro-tools for material transport via enhanced light-induced thermal convection. (a) Each micro-tool is fabricated using the two-photon-polymerization.

Slides:



Advertisements
Similar presentations
Nanowire dye-sensitized solar cells
Advertisements

Fiber Optics Communications. Topics Fiber Materials Fiber Manufactoring.
IFFAT FATIMA UOG. ELECTRON MICROSCOPE Contents History LM Vs EM Electron microscope Principle Types of EM Application & importance.
MetalMUMPs Process Flow
Silicon Nanowire based Solar Cells
Thickness (nm) Wavelength (nm) Tunable asymmetric reflectance in percolating silver films Miriam Deutsch, University of Oregon,
1 Microelectronics Processing Course - J. Salzman - Jan Microelectronics Processing Oxidation.
Photolithography Photolithography is the transfer of patterns, circuits, device structures, etc. to a substrate or wafer using light and a mask.
Nesibe Lakhani EECS 277A Prof. Richard Nelson
Fiona Beck Small Particles, Big Hopes: Absorption Enhancement in Silicon using Metallic Nanoparticles.
Design and Implementation of VLSI Systems (EN1600) lecture04 Sherief Reda Division of Engineering, Brown University Spring 2008 [sources: Sedra/Prentice.
Top Side Conductor vacuum deposition Aluminum sputter deposit in Argon plasma CVC 601-sputter deposition tool.
Applications of SPCE to Pharmaceutical Research Kathleen Hamilton, Tom Laue, and James Harper Presentation at the 2007 BITC Meeting University of New Hampshire.
Design and Implementation of VLSI Systems (EN0160) Sherief Reda Division of Engineering, Brown University Spring 2007 [sources: Sedra/Prentice Hall, Saint/McGrawHill,
Lecture #51 Lecture #5 – VLSI Design Review zPhotolithography zPatterning Silicon zProcess steps used are: yStarts with Si wafer yThermal oxidation yPhotoresist.
Goal Have a patterned material that blocks infrared light.
SOIMUMPs Process Flow Keith Miller Foundry Process Engineer.
YoHan Kim  Thin Film  Layer of material ranging from fractions of nanometer to several micro meters in thickness  Thin Film Process 
By Stephen Huse. Outline Abrasion and adhesion description Variables that change the wear rate Variables changed by coatings Surface coating processes.
LASER PHOTONICS INC. tel: fax: tel: fax: laserphotonics.comlaserphotonics.com.
Katedra Experimentálnej Fyziky Bipolar technology - the size of bipolar transistors must be reduced to meet the high-density requirement Figure illustrates.
Lecture 4 Photolithography.
CS/EE 6710 CMOS Processing. N-type Transistor + - i electrons Vds +Vgs S G D.
Surface Modification for Biomaterials Applications
LASER BEAM MACHINING BY S.PREMKUMAR.
Powerpoint Templates Page 1 Powerpoint Templates Optically induced flow cytometry for continuous microparticle counting and sorting Student: Chin – wei.
PCB manufacturing PCBpro.com.
Compound Light Microscope
Chemical Vapor Deposition A Simple method of bottom up Fabrication.
PVD AND CVD PROCESS Muhammed Labeeb.
SEMINAR ON IC FABRICATION MD.ASLAM ADM NO:05-125,ETC/2008.
The nanoparticle-plasmon resonance for proteomics Bongsu, Jung Jaehun, Seol Final Project, ME381R December 2,2004.
Semiconductor Manufacturing Technology Michael Quirk & Julian Serda © October 2001 by Prentice Hall Chapter 9 IC Fabrication Process Overview.
Techniques for Synthesis of Nano-materials
3D Micromanufacturing Lab. School of Mechatronics Gwangju Institute of Science and Technology 3D Micromanufacturing Lab. School of Mechatronics Gwangju.
Intro JWST Space Telescope By: Josh Nider Anthony Balon Nate Bowers Andrew Miller.
Lithography. MAIN TYPES OF LITHOGRAPHY: * Photolithography * Electron beam lithography –X-ray lithography –Focused ion beam lithography –Neutral atomic.
Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 1 Introduction to Electronic Circuit Design.
NMOS FABRICATION 1. Processing is carried out on a thin wafer cut from a single crystal of silicon of high purity into which the required p-impurities.
CORPORATE INSTITUTE OF SCIENCE & TECHNOLOGY, BHOPAL DEPARTMENT OF ELECTRONICS & COMMUNICATIONS NMOS FABRICATION PROCESS - PROF. RAKESH K. JHA.
ADVANCED HIGH DENSITY INTERCONNECT MATERIALS AND TECHNIQUES DIVYA CHALLA.
Atomic Layer Deposition for Microchannel Plates Jeffrey Elam Argonne National Laboratory September 24, 2009.
2. Design Determine grating coupler period from theory: Determine grating coupler period from theory: Determine photonic crystal lattice type and dimensions.
Thin Film Deposition. Types of Thin Films Used in Semiconductor Processing Thermal Oxides Dielectric Layers Epitaxial Layers Polycrystalline Silicon Metal.
Bump Bonding Development
Progress and Paper report Sept 23, Progress SPP Manuscript was accepted SPP Manuscript was accepted Evaporation of a multilayer coating with low.
Lithography. Lithography in the MEMS context is typically the transfer of a pattern to a photosensitive material by selective exposure to a radiation.
NANOSCALE LITHOGRAPHY, TECHNIQUES AND TECHNOLOGY EE 4611 DEHUA LIU 4/8/2016.
Antenna Project in Cameron clean room Wafer preparation, conductor deposition, photolithography.
Introduction to microfabrication, chapter 1 Figures from: Franssila: Introduction to Microfabrication unless indicated otherwise.
Solar Cells need a top side conductor to collect the current generated They also need a conductive film on the backside.
Photolithography Photolithography is the transfer of patterns, circuits, device structures, etc. to a substrate or wafer using light and a mask.
CMOS Fabrication CMOS transistors are fabricated on silicon wafer
Fabrication Process terms
Prof. Jang-Ung Park (박장웅)
Lithography.
The LIGA Process The term LIGA is an acronym for German term in “Lithography (Lithographie), electroforming (Galvanoformung), and molding (Abformung)”.
Leonard Vasiliev, Alexander Zhuravlyov and Alexander Shapovalov
Electron-Beam Machining
VLSI System Design LEC3.1 CMOS FABRICATION REVIEW
Substitute beer and pizza?
BioMEMS Device Fabrication Procedure
Surface Tension water molecules sticking together to form a skin on top of water Figure 8a-3: The following illustration shows how water molecules are.
Memscap - A publicly traded MEMS company
The effect of spin-orbital coupling and buffer layer to magnetic effect on Organic Light-Emitting Device Z. Y. Sun, B. F. Ding, X. M. Ding, X. Y. Hou Sample.
LITHOGRAPHY Lithography is the process of imprinting a geometric pattern from a mask onto a thin layer of material called a resist which is a radiation.
Substitute beer and pizza?
Status of ALD 33 mm MCP Development at Argonne
MICROSCOPES.
Photolithography.
Presentation transcript:

Figure 1Fabrication of micro-tools for material transport via enhanced light-induced thermal convection. (a) Each micro-tool is fabricated using the two-photon-polymerization process. A mask fabricated on top of each micro-tool defines the metal-coated region on the micro-tool. (b) After the micro-tools have been developed, a thin adhesion layer of titanium (1 nm) is first deposited, followed by a thin gold layer (5 nm), using electron beam physical vapor deposition. The mask shields the rest of the micro-tool and exposes only the region where the metal layer is going to be deposited (c) Selected micro-tools are collected by carefully dislodging and then drawing them into a fine glass capillary tube. They are subsequently loaded into a cytometry cuvette for trapping experiments. Each micro-tool has a footprint of 40 μm × 40 μm. Mark Jayson Villangca, Darwin Palima, Andrew Rafael Bañas and Jesper Glückstad, Andrew Rafael Bañas,Jesper Glückstad Light-driven micro-tool equipped with a syringe function null,2016,5(9) http://dx.doi.org/10.1038/lsa.2016.148