Orientation and Safety RPI Center for Materials, Devices, and Integrated Systems Clean Room Orientation and Safety Bryant Colwill

Facility Technical Staff RPI Center for Materials, Devices, and Integrated Systems Facility Micro- and NanoFabrication Clean Room or “MNCR” Technical Staff Bryant Colwill General Manager Xiaohong An (Sarah) Process Engineer David Frey Applications Engineer John Barthel Equipment Engineer Kent Way Equipment Engineer

NY State “Right to Know” Law

Primary Safety Concerns Chemicals Acids and Bases Oxidizers Solvents Hazardous Gases Toxic Corrosive Flammable

MNCR Floor Plan Enter through Garment Room RPI Public Safety 276-6611 Eye Washes / Showers Nine MNCR Exits Acid / Base Processing Area

Emergency Machine Off

Clean Room Air Circulation Class 100 Less than 100 particles per cubic foot HEPA Filtration High Efficiency Particle Arrestance Laminar Flow Work at arms length for particle sensitive work.

MNCR Alarms Fire Alarm (smoke detectors, pull stations) Chemical Spill Alarm (eye wash or shower in use) Exhaust Failure Alarm Hazardous Gas Alarm General Evacuation Alarm

Alarm Response Leave the MNCR immediately, using the closest exit Do not take time to remove your clean room garments until you are in a safe location Make sure that the staff knows that you got out safely

Alarm Response ONE EXCEPTION: If someone is injured and there is no immediate danger to you, you may wish to assist them.

No high heels or sandals in the MNCR Clean Room Protocol No winter boots, even in the garment room No high heels or sandals in the MNCR

Shorts and skirts are not allowed for safety and cleanliness reasons Clean Room Protocol Shorts and skirts are not allowed for safety and cleanliness reasons

Cardboard boxes and pencils generate many particles Clean Room Protocol Cardboard boxes and pencils generate many particles

Clean Room Protocol Contact lenses could worsen a chemical splash injury and are not allowed Notebooks and paper are permitted, but paper must not be ripped in the MNCR Note: Additional precautions are implemented for pregnant women

Clean Room Protocol Labeling Housekeeping Incident Reporting Name and date, at least Housekeeping Leave the work space clean even if you didn’t inherit it that way. Incident Reporting If you break something let us know.

MNCR Safety Training Chemical Safety

Safety Data Sheet

Personal Protective Equipment Face Shield Rubber Apron Chemical-Resistant Gloves

Hazards of HF (and BOE) A puddle of HF looks innocent – like a puddle of water HF can penetrate unbroken skin Exposure to HF may not cause pain until several hours later Exposure to HF can be fatal

First Aid for HF Exposure Calcium Gluconate 1. Remove affected clothing and rinse exposed area. 2. Apply gel with gloved hand. 3. Rinse and repeat until aided by emergency personnel. *Do not apply calcium gluconate directly to eye.

Chemical Accidents If a large chemical spill occurs, evacuate the lab. “Large” spill would equate to >1L of concentrated material. Smaller spills can be remedied by MNCR staff. If you think you may have been exposed to a chemical … 1. Remove any wet clothing. 2. Rinse the affected area under an eye wash or shower for at least 15 minutes or until aided by emergency personnel.

Fire and Explosions Barton Solvents Inc., 2007 Solvents Safety Most poignant risk is flammability and explosion. No open flame allowed in MNCR. Segregate ignition sources and flammables. Fire and Explosions Barton Solvents Inc., 2007

Liquid Nitrogen (LN2) Cryogenic liquid (-196◦C) Can cause severe frostbite and eye damage Can shatter containers and other objects Expands 700x as it boils off as N2 gas Can displace oxygen in enclosed spaces Can cause asphyxiation Bulk LN2 tank has 6,000 gallon capacity

Hazardous Waste Disposal Three critical waste streams in the MNCR HF All other acids and bases Solvents

HF Aspirator Solutions containing HF are aspirated into a holding tank HF Waste Tank

Hazardous Waste Disposal In the MNCR, all other acid/base solutions are flushed down the drain. Sink drains, rinse tanks and/or assigned aspirators are OK. All sources above feed sub-fab neutralization system. Empty acid/base bottles get rinsed and labeled, but are still considered hazardous waste “3x” User’s Initials

Solvent Disposal All solvents, and solvent waste, are collected in bottles. All stock solvents in MNCR can be co-mingled. Empty solvent bottles are capped, labeled and set aside Bottle Cap Hazardous Waste Label

Hazardous Waste Disposal Items contaminated with solvents are placed in a special disposal bin – never thrown in the regular trash Treat broken wafers like broken glass When in doubt, ask the staff or call Public Safety

MNCR Safety Training Compressed Gas Safety

Compressed Gas Safety Regulator Gas Cylinder

Non-Hazardous Gases Wall-Mounted Regulator Safety Strap

Gas Cylinder Cart

Compressed Gas Safety Hazardous gases used in the MNCR: Chlorine BCl3 2% Silane NF3 Ammonia Hydrogen Methane Ethylene

Tools Containing Hazardous Gases Plasma Etch Plasma Deposition Oxidation Furnace

Hazardous Gas Safety Measures Gas storage room Secure Class I Div 2 (explosion resistant) Semi-automatic gas cabinets

Semi-Automatic Gas Cabinet

Hazardous Gas Safety Measures Gas storage room Secure Class II Div 1 (explosion-proof) Semi-automatic gas cabinets Exhaust monitoring Coaxial tubing Welded, professionally installed Pressurized jacket (monitored) Gas sensors and alarms

Electrical and Mechanical MNCR Safety Training Electrical and Mechanical Safety

Electrical & Mechanical Safety Equipment contains high voltage and dangerous moving parts Never remove cover panels or protective guards from equipment Never reach under, behind or inside equipment Use common sense!

Who’s Responsible? RPI Safety Office Office of Environmental EVERYONE Health and Safety (EHS) Annette Chism, Director EVERYONE is responsible for lab safety! Be AWARE of your surroundings and of what you’re doing!