Brooks Expert Support Tool (BEST) Software for VDM300

Agenda VDM300 Installation Review Brooks Expert Support Tool (BEST) Orientation Mechanical Connections Electrical Connections Switches & LED Indicators Brooks Expert Support Tool (BEST) USB Cable & Driver Connecting to VDM VDM Monitor Screen Datalogging Streaming

VDM300 Mechanical Overview and Installation

VDM300 Top & Bottom View

VDM300 Mechanical Overview 4/19/2018 Vapor Outlet Vapor MFC Water Level Reed Switch Vapor Tank Internal View without cover, PCBA and insulation DI Water Drain & Fill Valves Ensure DI water line is connected and a supply of water is being provided during normal operation Inlet Manifold DI Water/N2 Inlet Minimum/Maximum Pressure 10/40 psig DIW Drain Front Elevation Side Elevation

Zero Button, LED Indicators & ECAT Address Switches

Front Panel Indicator & Switches 4/19/2018 See Section 1-9 of the Installation Manual: Page 1-6 in IOM

Electrical Connections & Communications Ports Diag Port Micro USB Analog 15-pin Dsub Digital ECAT RJ-45 Ports Required connector - ±15 Vdc power to PCBA & MFC heater Electrical power for tank heater only. Must be attached and switched on

Pin Configuration for 15 pin sub D-connector 4/19/2018 See section 2-6 of the IOM for complete details

Installation Highlights Mount and secure the VDM300 using 4 mounting screws Vertical, Flow up Connect vapor outlet to process chamber ensuring the vapor line is heated. Temperature of the line heater should be greater than the MFC block heater, > 100 °C Ensure there are no cold spots It is recommended that an shutoff valve be installed downstream of the VDM

Installation

Installation Highlights Connect DI water line Ensure water pressure is between 10-40 psig A constant supply of water during normal operation Connect 15 pin sub d-connection ±15 Vdc to power the printed circuit board and MFC heater Input/Output signals Control signals Alarms Connect 230 Vac to the power entry module Power for the tank heater

Startup Sequence Ensure vapor outlet is connect and pumped down < 200 mTorr Grounding pin 3 on the 15 pin sub d-connector put the VDM into the startup sequence - See Section 3 of IOM Evaluates the tank Starts filling the tank Turns on MFC heater Turns on tank heater once tank is filled

Brooks Expert Support Tool (BEST) Setting & monitoring alarms Changing mode of operation Data logging Streaming Changing specific attributes Tuning valve response Standard USB connection to device – no special cables or adaptors required

What You Will Need BEST Installation file Type-A Male to Micro B Male USB Cable USB Driver Available at BrooksInstrument.com 32 or 64 bit versions

[See video: BEST-Software-VDM300-Sept2017.mp4] BEST Demo [See video: BEST-Software-VDM300-Sept2017.mp4]

Installation Summary POWER- Ensure they have ±15Vdc and 230 volts AC Pin 3, See section 3 of the IOM for complete details Understand the warm-up conditions. Need water 1st Ensure DI Water Inlet Min-Max pressure Pump out downstream of VDM If tank is not to proper level, tank heater will not turn on Ensure downstream gas lines are heated above Block temperature.

BEST Summary Load BEST after you have loaded Multiflo 5.34 and or other programs.  It will override the Flocom’s of the other programs Switch to External control before exiting BEST Dump attributes before making any adjustments or changes, Ensure you indicate where the DUMP files will save.

Questions?