A Monolithic CMOS Microhotplate-Based Gas Sensor System

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Presentation transcript:

A Monolithic CMOS Microhotplate-Based Gas Sensor System Muhammad Y. Afridi John S. Suehle Mona E. Zaghloul David W. Berning Allen R. Hefner Elliott Cooper-Balis

MEMS Overview The integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology

Gas Sensor Motivations Use existing CMOS technology Low power Low cost Reliable detection Applications : Detection of harmful substances in public places Detection of freshness of food Detection of toxic leaks in manufacturing facilities

Microhotplate Gas Sensor Key Features : Suspended trampoline structure Polysilicon resistor heating element (2-kΩ) Metal-oxide film-based sensing element (Tin or Titanium)

Microhotplate Gas Sensor

Gas Sensor System

Gas Sensor System

Gas Sensor System

Gas Sensor System

Gas Sensor System

Thank You!