Matthew Storey and Dana Weinstein, Purdue University

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Presentation transcript:

Matthew Storey and Dana Weinstein, Purdue University Modeling and Design of Acousto-Electric MEMS Devices in Piezoelectric-Semiconductor Heterostructures Matthew Storey and Dana Weinstein, Purdue University AE effect: interaction of free carriers and acoustic wave through the piezoelectric potential. Goals: 1) Develop a FEM model for 2D/3D AE MEMS device geometries on various material stacks. 2) Compact model for AE MEMS devices to incorporate in MEMS system designs. AE interaction mechanism Simple AE SAW Delayline AE Theory/Sim Comparison NEEDS Annual Review: May 8-9, 2017