Scanning Electron Microscopy Techniques and Equipment In ASU’s Physics and Astronomy Department Professor Dr. Phil Russell Student Presenters Luke Robertson Jonathan Ivey James Phillips

Abstract Operation of Scanning Electron Microscopes(SEM) Imaging X-ray Microanalysis Operation of Focused Ion Beam(FIB) Microscope Machining Etching Deposition Applications of SEM & FIB Carbon Nanotubes Troubleshooting of Micro-processors Fiber Optic Machining Micro to Nano-scale Materials Analysis Solar Cell Materials Analysis

Microscopes Hitachi S570 W filament SEM A B Lower resolution than other SEMs in department Has a Oxford Silicon Drift Detector attached to measure X-ray energies to determine material composition ASU’s learning SEM B) SEM micrograph of gold on carbon

Microscopes Hitachi S4000 Field Emission SEM B C Hitachi S4000 Field Emission SEM Maximum magnification of 300,000x Lower beam current but smaller spot size Atomic Force Microscope tip High magnification micrograph of quartz filter paper with gold coating detailing cracks in the coating

Microscopes Hitachi FIB-2100 Hitachi LaB6 Images with heavy Gallium ions instead of electrons Capable of etching out samples for subsurface analysis Through gas injection system, can deposit different metals onto substrates Hitachi LaB6 Similar to S570, but uses LaB6 instead of Tungsten filament Able to achieve magnifications of 500,000x Uses lower beam current than S570, so we can get better signal to noise (resolution)

Images from the S570 Broken Solar Cell Unknown Sample X-Ray Spectrum A

Images from the LaB6 Carbon Nanotubes

Images from the TM3000 Honey Bee Eye Hitachi TM3000

Conclusion Instruction into the operation and components of SEM and FIB provides undergraduate students with an opportunity to learn about techniques for materials analysis. Knowledge of the operation of SEMs provides a background for performing further research in the area of materials science Understanding the components of SEMs and how they operate offers a better understanding of electrical physics and its applications.

Acknowledgements NSF STEP Grant Dr. Phil Russell Dr. Rahman Tashakkori