1. INTRODUCTION OF COMPANY Mecaro Co., Ltd is No.1 Best Semiconductor parts company authorized in parts area by producing optimal semiconductor part of equipment through ceaseless technology development and research for about 15 years. Company Name : Mecaro CO., Ltd. Foundation Date : 2000. 11 CEO : Jaejung, Lee Business Field : Semiconductor Heater Block, Semiconductor Chemical Source, GEM Foil, Etc. Page. 1

1. INTRODUCTION OF COMPANY GEM foil production milestone 2012: MOU between Korea CMS and MECARO for the industrialization of GEM foil production 2012: Technology transfer agreement with CERN 2013-2016: 1st 3-year government funding (~$2M) for facility set-up 2016-2019: 2nd 3-year government funding (~$2M) for the large GEM foil production for the CMS Muon Upgrade for LHC Long Shutdown 2 Technology Transfer CMS Upgrade MOU Production MOU RD51 MPGD team Page. 2

2. GEM FOIL PRODUCTION FACILITIES CLEAN ROOM Clean room is composed of a variety of rooms. : Room for production of GEM foil, Room for analysis of GEM foil Clean room is always maintained at less than 10000 Class. The equipment will be constructed for the production of super large size GEM foil. (Supersized Double mask align exposure machine, DES line ) ※ DES : Development & Etching & Strip Page. 3

2. GEM FOIL PRODUCTION FACILITIES FACILITIES (Current) Various size bath facilities are set-up. > To produce a GEM foil of various sizes. (Small, Large, Super Large size) > To produce a large number of GEM foil. Page. 4

2. GEM FOIL PRODUCTION FACILITIES FACILITIES (Current) Various equipment has been built for the production of GEM. Through a variety of analysis equipment to produce the highest quality GEM. Page. 5

2. GEM FOIL PRODUCTION FACILITIES FACILITIES (Proceeding) The new equipment will be constructed to produce a super large size of GEM : Supersized Double mask align exposure machine will be installed. (~ 2016. 12) : DES (Development & Etching & Strip) line machine (~ 2016. 12) Expected to enhance productivity and improve quality of large size GEM Page. 6

3. DEVELOPMENT STATUS MECARO GEM FOIL 50x50, 100x100, 300x300 GEM Foil Developed for Double Mask Method 100x100 GEM Foil test completed (CERN CMS, 2014.02.17) > Gain 2x higher than CERN foils (Triple-GEM) IBS GEM Foil(135x175) test completed (IBS, 2014.10) > Gain 10x higher than other company foils (Triple-GEM) 500 x 1000 GEM Foil developing for Single & Double Mask Method (2015.09~) Page. 7

3. DEVELOPMENT STATUS MECARO GEM FOIL IBS GEM Foil(135x175 Custom Design) delivery completion (IBS, 2015.12) 100x100 GEM Foil delivery completion (Korea University, 2016.2) 100x100 GEM Foil delivery planning (IBS, 2016.9) 300x300(Custom Design) GEM Foil delivery planning (IBS, 2016.12) Page. 8

4. MAIN PRODUCTS Available in various sizes and designs produced within 1250mm X 710mm. Capacity : Small & Large size (2000 foils/year), Super Large(700 foils/year) Page. 9

5. CONTACT Head Office 103-14, Sandan-ro, Pyeongtaek-si, Gyeonggi-do, Korea(Mogok-dong 439-5) TEL : 031-646-4400 FAX : 031-663-4447 Eumseong Office 261, Wonnamsandan-ro, Wonnam-myeon, Eumseong-gun, Chungcheongbuk-do, Korea (717) TEL : 070-4613-2700 FAX : 070-8250-8232 Homepage : http://www.mecaro.com The person in charge Sales team - Sangwook, Park (TEL : +82-31-646-4413, E-mail : swpark@mecaro.com) Engineer - Yeonsu, Yu (TEL : +82-70-4613-2751, E-mail : ysyu@mecaro.com) - Taejun, Kim (TEL : +82-70-4613-2751, E-mail : tjkim@mecaro.com) Page. 10