By: Thomas Thao EE 4611: Introduction to Semiconductors MEMS, Sensor By: Thomas Thao EE 4611: Introduction to Semiconductors

Overview What does MEMs Stand for? Materials for MEMS Manufacturing Video Description of MEMS Sensors Applications Products of Sensors Five Takeaways

What does MEM stand for? Micro-electromechanical systems (MEMS) They are miniaturized mechanical and electro-mechanical elements that are made using the techniques of microfabrication

Materials for MEMS Manufacturing Silicon Polymers Metals Ceramics

Video: MEMS Sensors https://www.youtube.com/watch?v=Vld-5Z1YGVM

Applications Biomedical technology Medicine Communications Inertial sensing

Sensors Product Automotive Sensors Gyroscopes Humidity Sensors Pressure Sensor Temperature Sensors Touch Sensors UV Sensors Proximity Sensors

Automotive Sensors Varies sensors are needed to help create a save functional car Each component helps each other for the movement of the vehicle Needlessly to say, these are just basic sensors for a car More sensors developing such as visional sensors, touch screen, etc. http://www.bourns.com/products/automotive/automotive-sensors

Humidity & Temperature Sensors Provide accurate measurements of dew points and absolute humidity by combining humidity and temperature measurement Works along side with temperature sensors to retrieve temperature measurements Demanding applications include, automotive, aerospace, home appliances, etc.

Pressure Sensors Force collector types: Other types: Piezoresistive strain gauge: Uses piezoresistive effect of bonded or formed strain gauges Capacitive: Uses a diaphragm and pressure cavity to create a variable capacitor Electromagnetic: Measures the displacement of diaphragms in terms of inductance Optical: Uses of the physical changes of an optical fiber Other types: Thermals, Ionizations, Resonant, etc.

Touch Screen Sensors Clear glass panel with a touch responsive surface Sensor has an electrical current or signal going through it and touching the screen can cause an voltage or signa change Includes a touch screen panel, a controller and a software driver

Summary There are lots of sensors are used by MEMS and continually growing as technology advances MEMS sensors have steadily increase in growth through the 2000’s in applications in many industries and arenas such as medical, consumers, industrial and automotive. MEMS sensors are improving technology annually Microsensors converts measured mechanical signal into an electrical signal.

Reference Automotive Sensors and Switches”. Sensata. Sensata Technologies. Web. 06 Apr. 2017. <http://www.sensata.com/sensors/automotive-sensor-switch-switches.htm > “ Bosch Semiconductors & Sensors”. MEMS Sensors. Bosch Invented for Life. Web. 06 Apr. 2017. <http://www.bosch- semiconductors.de/en/automotive_electronics/mems/mems_.html> “MEMS and Sensors”. STMicroelectronics. ST Life Augmented. Web. 30 Mar. 2017. <http://www.st.com/en/mems-and- sensors.html> “Mircoelectromechanical Systems”. Wikipedia. Wikipedia Foundation. Web. 30 Mar. 2017. <https://en.wikipedia.org/wiki/Microelectromechanical_systems> “What is MEMS?”. MEMS & Sensors Industry Group. N.p., n.d. Web. 06 Apr. 2017. <http://www.memsindustrygroup.org/?page=WhatIsMEMS> “What is MEMS?”. MEMSnet. MEMS Cleanhouse. Web. 01 Apr. 2017. <https://www.memsnet.org/company>

Five Takeaways Components on MEMS are: MicroStructures, MicroActuators, MicroSensors and MicroElectronics Materials to MEMS Manufacturing: Silicon, Polymers, Metals and Ceramics Bosch MEMS are used on daily appliances such as cars, phones, gaming industry and many mores. Pyroelectric and piezoelectric properties enables sensors (Ceramic materials) MEMS sensors are steadily increasing yearly in industries such as the medical field, industrial field, consumers field and automotive fields.