transistor technology

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Presentation transcript:

transistor technology Evolution of Intel’s transistor technology 45 nm – 14 nm Dezső Sima Vers. 1.0 October 2014

Contents 1. Overview of the evolution of Intel’s basic microarchitectures 2. The high-k + metal gate transistor 3. The 22 nm 3D Tri-Gate transistor 4. The 14 nm 3D Tri-Gate transistor

1. Overview of the evolution of Intel’s basic microarchitectures 3

1. Overview of the evolution of Intel’s basic microarchitectures-1 1. Overview of the evolution of Intel’s basic microarchitectures (Based on [1]) 1. gen. 2. gen. 3. gen. 4. gen. 5. gen. Core 2 New Microarch. 65 nm Penryn New Process 45 nm Nehalem New Microarch. 45 nm Westmere New Process 32 nm Sandy Bridge New Microarch. 32 nm Ivy Bridge New Process 22 nm Haswell New Microarchi. 22 nm Broadwell New Process 14 nm TOCK TICK TOCK TICK TOCK TICK TOCK TICK 2006 2007 2008 2010 2011 2012 2013 2014 Figure 1.1: Intel’s Tick-Tock development model (Based on [1])

1. Overview of the evolution of Intel’s basic microarchitectures-2 Evolution of Intel’s process technologies [82] 2014 New transistor structures High K + Metalgate Tri Gate 1. gen. Tri Gate 2. gen. Related proc. family Penryn Ivy Bridge Broadwell

1. Overview of the evolution of Intel’s basic microarchitectures-3 14 nm Broadwell SOC yield trend [154]

2. The high-k + metal gate transistor 7

2. The high-k + metal gate transistor-1 Core 2 New Microarch. 65 nm Penryn Process 45 nm Nehalem Westmere 32 nm Sandy Bridge Ivy Bridge 22 nm Haswell Microarchi. TOCK TICK 1. gen. 2. gen. 3. gen. 4. gen. 5. gen. Broadwell 14 nm Figure: Intel’s Tick-Tock development model (Based on [1]) Introduced along with the Penryn family of processors in 2007.

2. The high-k + metal gate transistor-2 The need to introduce new transistor design [21] Sub-threshold = Source-Drain Figure 3.1.1: Dynamic and static power dissipation trends in chips [21]

2. The high-k + metal gate transistor-3 Structure of the high-k + metal gate transistors [23]

2. The high-k + metal gate transistor-4 Benefits of the high-k + metal gate transistors [23], [24]

3. The 22 nm 3D Tri-Gate transistor 12

3. The 22 nm 3D Tri-Gate transistor-1 Core 2 New Microarch. 65 nm Penryn Process 45 nm Nehalem Westmere 32 nm Sandy Bridge Ivy Bridge 22 nm Haswell Microarchi. TOCK TICK 1. gen. 2. gen. 3. gen. 4. gen. 5. gen. Broadwell 14 nm Figure: Intel’s Tick-Tock development model (Based on [1]) Introduced along with the Ivy Bridge family of processors in 2012.

3. The 22 nm 3D Tri-Gate transistor-2 The traditional planar transistor [82]

3. The 22 nm 3D Tri-Gate transistor-3 fin The designation “tri-gate” originates from the fact that now the gate has three sides.

3. The 22 nm 3D Tri-Gate transistor-4 The 22 nm Tri-Gate transistor-3 [82]

3. The 22 nm 3D Tri-Gate transistor-5 Switching characteristics of the traditional planar and tri-gate transistors [82]

3. The 22 nm 3D Tri-Gate transistor-6 Gate delay of the traditional planar and tri-gate transistors [82] Gate delay: time difference between output signal and input signal of a gate (n x ps)

3. The 22 nm 3D Tri-Gate transistor-7 Intel’s 22 nm manufacturing fabs [82]

3. The 22 nm 3D Tri-Gate transistor-8 22 nm Ivy Bridge chips on a 300 mm wafer [82]

4. The 14 nm 3D Tri-Gate transistor 21

4. The 14 nm 3D Tri-Gate transistor-1 Core 2 New Microarch. 65 nm Penryn Process 45 nm Nehalem Westmere 32 nm Sandy Bridge Ivy Bridge 22 nm Haswell Microarchi. TOCK TICK 1. gen. 2. gen. 3. gen. 4. gen. 5. gen. Broadwell 14 nm Figure: Intel’s Tick-Tock development model (Based on [1]) Introduced along with the Broadwell family of processors in 2014

4. The 14 nm 3D Tri-Gate transistor-2 14 nm 2 generation Tri-gate transistors with fin improvement [154]

4. The 14 nm 3D Tri-Gate transistor-3 14 nm Broadwell SOC yield trend [154]

4. The 14 nm 3D Tri-Gate transistor-4 Benefits of reducing the feature size [154]

4. The 14 nm 3D Tri-Gate transistor-4 Leakage power vs clock speed for smaller feature sizes [154] fc > Vc Vc > Il > Ds

4. The 14 nm 3D Tri-Gate transistor-5 Clock speed vs. leakage power for smaller feature sizes and related product sectors [154]