National Taiwan University

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Presentation transcript:

National Taiwan University 優貝克討論會 Prof. M.-H. Liao (廖洺漢) National Taiwan University mhliaoa@ntu.edu.tw 2017/1 優貝克

M.-H. Liao (廖洺漢) Education: Experience: Research: http://www.me.ntu.edu.tw/main.php Education: Department of Mechanical Engineering, National Taiwan Uni. B.S. 1999-2003 Graduate Institute of Photonics and Opto-electronics, National Taiwan Uni. PhD. 2003-2007 (Advisor: Prof. CheeWee Liu) Experience: RD/TD, TSMC, 2007-2011 (A9 chip in Apple i-Phone 6s) Assistant/Associate professor, Department of Mechanical Engineering, National Taiwan Uni., 2011-Now Publish 30+ technical papers in top conference proceedings and international journals such as IEDM and VLSI, mainly in the field of advanced transistor developments along with 10+ patents. Demonstrate the high device performances of Ge (VLSI 2014)/III-V MOSFETs, steeper slope transistors with negative capacitance effect and low power consumption (IEDM 2015), vertical nano-wire/tube devices (JAP), and magnetic spin-electronics (VLSI 2014). Research: Semiconductor technology MEMS IoT Micron-NTU Day

Magnetic Logic Device and Cell (VLSI 2014) * VLSI 2014, By M.-H. Liao et.al. How to create the high built-in Magnetic field in the Metal Gate ? Different Sputter Chamber Design ? (With the External Magnetic Field ?) 優貝克

The enhancement of Melting point in Si/Ge The Melting point on Si and Ge is very critical for the semiconductor process/device (activation..). We are finding the way to extract it accurately and try to enhance it. How to enhance the melting point in Si and Ge ? Anneal with different pressure environment and different anneal/temperature arise rate is a solution ? 優貝克

Atomic Layer Deposition/Etching System Atomic Layer Deposition and Etching System is very important for the industry. If it is possible to grow the crystal Si and Ge by ALD System ? 優貝克

Local thermometry of self-heated nano-scale devices (Temperature Extraction) Tool Set-Up Demo- Principle How to measure the temperature in the nm-level space resolution is very important for the application in the industry. Build up the temperature measurement system with the AFM ? 優貝克

Acknowledgement We appreciate the funding support from the government, industry, and university. The useful discussion and in-put from the academic colleagues is also very appreciated. 優貝克