(LAM Rocker Door Assembly Modify Proposal ) DRY-ETCH (LAM Rocker Door Assembly Modify Proposal )

1) Equipment & Valve Location ■ Equipment: LAM reserch ■ Process: Dry Etch ■ Valve Location: Multi Chamber Process Operation ( Between Transfer chamber (Bath Type) and Process Chamber ) Slit valve Location Transfer chamber Process Transfer Chamber Process Chamber

2) Existing Valve Problem Cylinder Change Impossible Process Chamber Maintenance No Space. Transfer Up/Down Cylinder-1 PM Cylinder-2 Cylinder-3 Valve Fail ■ Chamber Vent - In case of Valve Fail, due to release the docking on Chamber, Vent is occurred. (Back-up Lead time : around 8~9 hr.) ① Due to Chamber Back –up Time, equipment yield is reduced. ② Due to release the Chamber docking, Labor Cost is charged. ■ Valve Maintenance Impossible. - Currently, under the docking condition, in case of valve fail, maintenance is impossible without disassembling the Process Chamber. (Bolt which is to disassemble Valve Actuator inside Cylinder is designed on the opposite side.

Chamber Vacuum Keep (Available) 3) New Version Modify Proposal ■ Modified Contents Process Chamber Transfer Chamber Valve Fail Flange ■ Chamber Vacuum Keep (Available) - In case of Valve Fail, no need to release Chamber Docking ( No Chamber Vent ) ① Chamber Back –up Time is reduced → Yield Increase ② Labor cost is down since there is no need to release Chamber Docking. Vacuum Side Chamber Vacuum Keep (Available) Cylinder Change (Available) Before Modify After Modify Block Ass’y Up/Down Cylinder PM용Cylinder Process용Cylinder ■ Modify Contents → Valve Actuator body Modify (New Parts & Modify) → Modify Cylinder ① Up / Down Cylinder ② P / M Cylinder ③ Process Cylinder

3) New Version Modify Proposal ■ Maintenance Method Before modify, Valve Maintenance Method After modify, Valve Maintenance Method FixedBlock Bolt location Disassembly Impossible ■ Bolt which is to disassemble Valve Actuator inside Cylinder is designed on the opposite side. (Assembly & Disassembly is impossible) ■ Easy Assembly / Disassembly of Cylinder

(LAM Rocker Door Cylinder Proposal ) DRY-ETCH (LAM Rocker Door Cylinder Proposal )

1) Lam Equip. Slit valve Cylinder Problem 1. Body Body Fail Reason 1. :Running Part’s Seal-ring is consisted with a thin O-ring so that it occurs air leak even though there is a little abrasion. Due to the design of this valve, even it’s repaired, it will have the same problem again soon. 2. Inside Air in Air in Fail Reason 2. :On disassembly, Shaft need to be twisted so that it will have scratch on it. It leads to air leak(Repair Impossible) Working(Good) Working(Bad)

2) Lam Equip. Slit valve Cylinder Modify Proposal Modify Contents 1. Body 2. Busing 3. packing 4. Shaft O-Ring Type PNY U-Packing Type 5. Psd seal 6.Magnetic 7. Psd seal O-Ring Type Dual PDF-Seal Type Extended Life Time After Modify, Dual seal & U-Packing is applied ( Prevention on inside/outside Air Leak )

Compact社Cylinder Modified Model Lode lock Cylinder T/M Door Cylinder Model :SL-A01 T/M Door Cylinder Model :ST-A01 UP-DOWN Cylinder Model :SM-M01

(LAM Rocker Door Assembly Procedure) DRY-ETCH (LAM Rocker Door Assembly Procedure)

New Version Description ◆ Parts Description 1) Main Block 1) Main Block 2) B Type Cylinder 3) A Type Cylinder Ass’y 4) C Type Cylinder Ass’y 2) Cylinder B (UP/DOWN) 5) Cylinder Guide Block 3) Cylinder A (T/M ) 5) Cylinder Guide Block 4) Cylinder C (P/M )

2) B(UP/DOWN) Type Cylinder 3) A( T/M)Type Cylinder Ass’y New Version Modify Contents 1) A Type Cylinder Ass’y 세부내용 ■ Main Block - Easy to Replace Cylinder 가공품제작 2) B(UP/DOWN) Type Cylinder ■ Modify Cylinder - Life Time is improved. 3) A( T/M)Type Cylinder Ass’y + + Cylinder Guide A Type Cylinder Cylinder Joint Block

4) C(P/M ) Type Cylinder Ass’y New Version Modify Contents 4) C(P/M ) Type Cylinder Ass’y 세부내용 + + 가공품제작 Cylinder Guide C Type Cylinder Cylinder Joint Block 5) Cylinder Guide Block ■ Cylinder Guide Block - Easy to replace Cylinder