ENM 310 Design of Experiments and Regression Analysis

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ENM 310 Design of Experiments and Regression Analysis Experiments with a Single and Multi-Factor : The Analysis of Variance Examples with Minitab Outputs 09.03.2017

Experiments with a Single Factor: ANOVA Example 1 An engineer is interested in investigating the relationship between the radio- frequency (RF) power setting and the etch rate for a typical single-wafer etching tool. The engineer wants to test four levels of RF power: 160W, 180W, 200W, and 220W. She decided to test five wafers at each level of RF power. An engineer is interested in determining if the RF power setting affects the etch rate. She has run a completely randomized experiment (to decrease the noise effects) with 4 level of RF power and five replicates. Here, the response variable is etch rate. The 4 levels of RF power are from 160W to 220W The experiment is replicated 5 times.

i=1,..,a  i=1,..,4 j=1,..,n  j=1,..,5 N=axn=4x5=20 =12,355 =617.75

Entry of Data into Minitab Data Analysis

CI on the (i)th treatment mean

Model Adequacy Checking Stat>Anova>Oneway...> Graphs

Test for Equality of Variance Bartlett’s test

Levene’s test

Experiments with a Multi-Factor: ANOVA Example 2 An engineer is designing a battery for use in a device that will be subjected to some extreme variations in temperature. The only design parameter that he can select at this point is the plate material for the battery, and he has three possible choices. When the device is manufactured and is shipped to the field, the engineer has no control over the temperature extremes that the device will encounter, and the knows from experience that temperature will probable affect the effective battery life. However, temperature can be controlled in the product development laboratory for the purposes of a test. The engineer decides to test all three plate materials at three temperature levels,15, 70, 125 oF, because these temperature levels are consistent with the product end use environment.

539 229 230 623 479 198 576 583 342 A= Material type; B= Temperature What effects do material type & temperature have on life?