Date of download: 10/15/2017 Copyright © ASME. All rights reserved. From: Scalable Fabrication of Low Elastic Modulus Polymeric Nanocarriers With Controlled Shapes for Diagnostics and Drug Delivery J. Micro Nano-Manuf. 2015;3(1):011002-011002-8. doi:10.1115/1.4028896 Figure Legend: D-FIL process for fabricating nanocarriers in drug delivery applications: (a) illustration and SEM of mechanically stable hole-tone imprint (40 nm diameter holes with 100 nm pitch) over SiOx masked PVA layer on a Si substrate; (b) break-through etch into the SiOx masking layer; (c) transfer of etched pattern with varying depths as shown in SEM images (c1) AR = 1:1, (c2) AR = 2:1, and (c3) AR > 3:1; (d) imprint planarization of patterned PVA layer; (e) removal of top residual layer; and (f) dissolution of PVA layer in DI water to harvest nanocarriers.