MEMS: Invention to Market

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Presentation transcript:

MEMS: Invention to Market Invention->Market Creation of a new market is slow. Market->Invention (easier) What is the existing competition? Impact – will it take over the market? Manufacturing Sales Modeling as in this course: Analysis of options, performance, price. Planning of R+D, business plan.

Device Categories Technology Demonstrations Research Tools Test device concept Test fabrication technology Small # of devices/low yield ok Research Tools Small # of devices, often custom. Commercial Products Large # of devices, high yield, low cost, packaging all critical.

Transducers, Sensors, and Actuators Transducers: Generally convert one form of energy to another. (Not generally conserving energy.) Could be a sensor or an actuator. Sensors measure something and provide an output signal. Usually electrical, but sometimes optical or mechanical. Actuators move something. (But what would an LED be?)

Domains Thermal (temperature, heat, heat flow) Mechanical (force, pressure, velocity, acceleration, position) Chemical (concentration, composition, reaction rate) Magnetic (magnetic field intensity, magnetization) Radient (intensity, wavelength, polarization, phase) Electrical (voltage, current, charge, resistance)

Examples of Sensors and Actuators Position Sensors Resistive strain sensor. (dimensions change, R=rl/A) Piezoresistive strain sensor. (dimensions and r change) Sensitivity measured by the gauge factor GF=relative resistance change/strain=(DR/R)/(DL/L)=DR/eR GF=~2 for metals (mostly geometry, some piezoresistance) GF=~100 for semiconductors (piezoresistive)

Piezoelectric materials (Curies, 1880) Electric field <-> strain (deformation) Polarization <-> stress Sensor/Actuator In your watch, Quartz (but this is changing!! (Si Time)) Also pyroelectric materials have temperature<->polarization. Magnetostrictive Actuators Materials expand/contract with magnetic field Similar to piezoelectric effect Terfenol-D Tb0.27Dy0.73Fe1.9 -> strain of 2X10-3 or 0.2%.

Sizes, again. How big is 0.1Å? Bohr radius (hydrogen) = 0.53Å = 0.053nm. C-C bond (diamond) = 1.55Å = 0.155nm Si-Si bond = 0.235nm Si lattice constant = 0.54nm Wavelength of green light = 5000Å. Smallest commercial transistor: 25 nm How big are MEMS? What about NEMS?

Permanent magnetic materials Micromirror, microrelay, micromotor N S N S B