Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory Presentation to ESTECH 2005 Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

Investigating the Performance of a Minienvironment System Tengfang (Tim) Xu, Ph.D., PE Environmental Energy Technologies Division Lawrence Berkeley National Laboratory May 3, 2005 2 2

Investigating the Performance of a Minienvironment System Introduction Scope and Objectives Case Study Methods Results Conclusions and Recommendations 2 2

Introduction Minienvironment A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment Separative Devices 2 2

Why Minienvironment? Minienvironment - Separative Devices Gaining wide adoption in various industries Knowledge about energy efficiency Emerging technologies and strategies to improve efficiency 2 2

Cleanroom Electric Power Cleanroom Measured Power

Cleanroom Contamination Control

Efficient Air Systems Reduce initial costs optimized sizing Reduce utility costs while benefiting productivity Other non-energy benefits Energy efficient design can be considered as a strategy in the industry to achieve cost savings and improve bottom line

ISO Standards from IEST The Institute of Environmental Sciences and Technology (IEST) ISO 14644 (1 through 8): Cleanrooms and Controlled Environments ISO 14698 (1 through 3): Bio-contamination

Minienvironment within a Ballroom (Cleanroom)

Background Energy information on minienvironments is essentially non-existent Understand energy efficiency opportunities in minienvironments Key metrics: W/cfm 2 2

Objectives Develop an understanding of the key parameters contributing to energy performance of a minienvironment Quantify energy performance of the minienvironment air system and identify opportunities for improving its energy performance. 2 2

Approaches Literature reviews Develop a case study on minienvironment system performance Collaborate with industry leaders and Sematech in research actions 2 2

Case Study Method Minienvironment Electric Power Airflow and Pressure 4 FFUs of 1’x2’ Dimensions (2’x4’x 7’7’’) Electric Power True RMS energy analyzer (±3%) Airflow and Pressure electronic micro-manometer (±3% of reading plus ±7 fpm) Pitot tube (±2% of reading + 0.25Pa)

Total fan power vs. Airflow rate Case Study Results Total fan power vs. Airflow rate

Power factor vs. Airflow rate Case Study Results Power factor vs. Airflow rate

Case Study Results EPI vs. Airflow rate

Static pressure vs. Airflow rate Case Study Results Static pressure vs. Airflow rate

Pressure difference vs. airflow rate Case Study Results Pressure difference vs. airflow rate

Conclusions Measure up with Cleanrooms: EPI

Recommendations - i Improve energy performance of minienvironment systems Fan-filter Unit Airflow path 2 2

FFU: Wide Range of Efficiencies

FFU: Performance

Recommendations – ii Understand energy implications of minienvironment vs. cleanroom through demonstrations Electric power usage Size of minienvironment Cleanliness requirements 2 2

Recommendations - iii Develop demonstration for approach and tools to tackle and implement energy efficiency throughout planning, construction, installation, design, commissioning, O&M, re-commissioning, reuse of minienvironment and integration with process and cleanroom facility 2 2

Recommendations - iv Develop and identify strategies in energy efficiency for effective environmental control 2 2

Interaction with IEST Interact with IEST to possibly adopt energy efficiency in recommended practice (RP) guidelines IEST WGs 2 2

TTXU@LBL.GOV Lawrence Berkeley National Laboratory Questions TTXU@LBL.GOV Lawrence Berkeley National Laboratory 2 2