SEMI 300mm Equipment Standards Overview E39, E40, E84, E87, E90, E94, E116 Mike Baxter INTEL CONFIDENTIAL

Content Overview Goals for Each Standard Example – Putting the Standards Together INTEL CONFIDENTIAL

Overview 300mm Standards (SEMI GEM300 TF) E84 (Carrier Handoff PIO) – Standardizes the low-level communication between AMHS and tools/stockers. This allows material delivery without manual intervention. E87 (CMS) – Standardizes carrier loading and unloading (via AMHS or an operator), along with verifying its ID and contents with a host system (SC). E90 (STS) – Standardizes the tracking of material as it enters, moves through equipment and is processed or measured, and exits. This is an informational standard. E39 (OSS) – Standardizes how information about objects and their attributes is accessed and updated. A subset of this standard is required by each of the 300mm standards, and any standard that is “object-based.”

Overview 300mm Standards (Cont) E40/E94 (PJ/CJ) – These standards are commonly grouped together, as they standardize methods to manage the work on production equipment (related to processing recipes and correlating with wafers and/or carriers). E116 (EPT) – Used to track equipment performance and availability, on a module (chamber) level as well as an overall tool level, to improve data collection for E10 metrics. Like E90, this is an informational standard. Note that this is being implemented in A/T. Note also that E116 was not created specifically for 300mm.

SEMI E84 Parallel I/O E84 allows for safe and reliable FOUP transfers between the tool and the OHV The E84 connection is wire based. Equipment suppliers provide one E84 plug per load port at the top of the equipment. (Plug location in SEMI E84) Intel uses an emulator to test the sequence and timing of the E84 interface E84 was created with 300mm in mind – some signals were added for carrier safety, other signals were simplified Similar to E23 (200mm intrabay)

E84 Parallel I/O Interface Bay wall ceiling Photo-coupled link AMHS is the active partner Equipment / OHV interface point = plug on the top of the tool Intrabay AMHS supplier scope equipment supplier scope Process equipment is the passive partner Equipment / AGV interface point = IR link (sort only) E15.1 Load port Photo-coupled link

SEMI E116 Defines standard state model for tools and major modules (e.g. chambers) Defines standard events and data items for tools to report to Station Controller Requires that the tool report to Station Controller: -When Tool and Modules are IDLE, BUSY, BLOCKED (Interrupted) -Time in each state -Which modules of Tool are in which state -Reasons for Interrupts

Goals for E87 Carrier Management Standard Provides state models and scenarios that define host interaction with production equipment for the following: Carrier transfer between AMHS vehicles and tool LP’s Carrier transfer to/from tool internal buffer space Access mode switching (per-port or tool basis) Carrier to load port association Carrier ID verification Carrier slot map verification

E87 Load Port Transfer State Model

E87 Carrier Object State Model Common Scenario: 1. Instantiation: Carrier is loaded, clamped, and ID is read.

E87 Carrier Object State Model Common Scenario: 2. WFH: Carrier ID is read and reported to the SC.

E87 Carrier Object State Model Common Scenario: 3. ID Verified: SC issues PWC and the ID is verified

E87 Carrier Object State Model Common Scenario: 4. Slot Map Read: Tool reads and reports slot map

E87 Carrier Object State Model Common Scenario: 5. Slot Map Verified: SC verifies slot map and issues PWC

E87 Carrier Object State Model Common Scenario: 6. Carrier is Run: Carrier is accessed and completes Note that the carrier can be “re-run” at this point by issuing “CarrierRecreate”

Goals for E90 Substrate Tracking Standard Provides methods to monitor equipment substrate locations (indicating if it’s occupied or empty) Provides collection events to indicate material movement between substrate locations Provides a state model to track the processing status of material (useful for misprocess checking) Useful for applications such as FDC, TWT, DSS data publishing, etc.

E90 Substrate Object State Model

Other E90 Objects Since the lifetime of the substrate object is limited, two other objects are defined by the standard for host usage Location Object Substrate History Object The Location object is defined for each physical location on the tool which the substrate may occupy Contains attributes which can be queried at any time by the host: LocationState (Occupied, Not Occupied), SubstrateID This is very useful for FDC / EP The Substrate History object is defined per tool Contains attributes which can be queried at any time by the host: SubstrateHistoryLog (list structure containing substrate Ids, Time In, Time Out, SubstrateProcessState, etc.) This object can be useful for assessing the condition of substrate objects which are no longer located on the tool (when implemented as such)

Goals for E40/E94 Process Job/Control Job Standards Provide methods to manage work on production equipment, for example, all processing recipes & instructions associated with a carrier or group of carriers. Provide a method for the disposition of material after processing. Provide a standard job setup across all tools in the factory. Reduce the amount of host level interaction required for material processing. Used for running single and multiple recipes with each introduction / run.

SEMI E40 Overview Process Job Definition A Process Job specifies and tracks the processing to be applied to the material. A PrJob contains a single recipe. A PrJob can associate a single recipe to one substrate, or a single recipe to all substrates in a carrier. A PrJob can contain a list of recipe parameters a host may want to modify prior to processing (limited APC). A PrJob can contain a list of collection events (CEIDS) for which processing should pause (APC/EP) PrJobs contain several other attributes and configuration variables for specifying and monitoring equipment processing

E40 Process Job State Model The PrJob state model details the life span of a process job (not necessarily a single wafer) as it is created, pooled, processed, and eventually destroyed Each transition in the state model should have an associated collection event (CEID) Refer to the state model on the next slide

E40 Process Job State Model

SEMI E94 Overview Control Job Definition A Control Job defines a unit of work on equipment for one or more carriers. The work is described by a set of one or more process jobs to be applied to the material in the carrier(s). A CJob specifies one or more carriers. CJobs provide queue management services to the host for changing the order in which process jobs currently queued are run (List, Arrival, Optimize) CJobs can explicitly define carrier destination locations for substrates if uni-carrier/slot integrity functionality is not needed/desired for a particular process job CJobs contain several other attributes and configuration variables for managing PRJobs and material disposition

E94 Control Job State Model The CJob state model details the life span of a control job as it is created, queued, executed, and eventually destroyed Each transition in the state model should have an associated collection event (CEID) Refer to the state model on the next slide

E94 Control Job State Model

SEMI E39 Object Services Standard E39 provides common methods of setting and querying information about other SEMI objects and their attributes Examples of SEMI objects include carriers, substrates (wafers, die, boards, etc.), wafer locations, and jobs. Examples of object attributes are below: E87 E90 Control Job (E94) Process Job (E40) PJ PJ PJ Object ID Capacity Carrier ID Status Content Map Location ID Slot Map Slot Map Status Substrate Count Usage Object ID Material Status History Source/Destination Location ID Processing State Type Usage Time In/Out (Loc) Object ID Pause Event Job State Material List Material Type Process Start Recipe Method Recipe ID Recipe Variable List Object ID Current PR Job Data Collection Plan Carrier Input Material Output Mtrl Out by Status Pause Event Proc Control Spec Process Order Start Method

Putting it all Together Common Fab Scenario: Lot is delivered via AMHS AMHS communicates with the tool and unloads FOUP (E84) FOUP is clamped, ID is read, FOUP is docked, door is opened, and slotmap is read [E87] Wafers are associated with recipes, and the job begins running on the tool (E40/E94) Wafer movement is reported from the tool (E90) Module/chamber status changes are reported (E116) Jobs complete, all wafers return, FOUP door is closed, and the FOUP is removed from the tool by the AMHS (E84,E87,E90,E40,E94)

Wafers run and jobs complete OHV NTSC Carrier Delivery ID & Slotmap Read Job Setup Jobs commence Wafers run and jobs complete Carrier is Removed E40E94 E90 E40E94 E87

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