SEMICAPS DIFFRACTIVE SIL

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Presentation transcript:

SEMICAPS DIFFRACTIVE SIL DiFFRACTIVE SILICON IMMERSION LENS Using Diffractive SIL to improve image resolution Concept of Diffractive SIL Ring shaped pattern etched into silicon that acts as a lens Pattern diameter is typically 200um Alters the phase of light traveling through it Fabrication of Diffractive SIL Utilizing Focus Ion Beam system (FIB) to etch out the ring patterns Creates ring structures of high and low regions. The ring sizes are tailored to specific wavelength and thickness, achieving the desired focal length Silicon steps are approximately 268nm in height Total fabrication is approximately 25 minutes Application: As shown from the TIVA images obtained from SOM 3000 system, image resolution has improved significantly with the the diffractive SIL