Microelectronic Fabrication

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Presentation transcript:

Microelectronic Fabrication Lecture IV Thermal Processes School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Processes in IC Fabrication ` School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Processes: Definition School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Processes OXIDATION School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Introduction School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Introduction School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Diffusion Barrier School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Passivation Surface School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Screen Oxide School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Pad & Barrier Oxides in STI Process School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Pad Oxide School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Device Isolation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Blanket Field Oxide Isolation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – LOCOS School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – LOCOS Process School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Sacrificial Oxide School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Device Dielectric School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Application – Device Dielectric School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Mechanisms School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Mechanisms School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Oxide Growth Rate Regime School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: < 1 0 0 > Silicon Dry Oxidation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Wet (Steam) Oxidation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: < 1 0 0 > Silicon Wet Oxidation Rate School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation Rate School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation Rate: Temperature School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation Rate: Wafer Orientation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation Rate: Wet Oxidation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation Rate: Dopant Concentration School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation Rate: Differential Oxidation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation Process School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Dry Oxidation System School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Dry Oxidation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Gate Oxidation Steps I School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Gate Oxidation Steps II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Wet Oxidation Process School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Wet Oxidation Process Steps I School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Wet Oxidation Process Steps II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Rapid Thermal Oxidation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxide Measurement School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Oxidation: Summary School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Processes DIFFUSION School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion: Introduction School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping: Illustration School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping: Illustration School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping: Illustration School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping Process I School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping Process II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping Process II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping Process Steps I School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping Process Steps II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping Process Steps III School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping Process Steps IV School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping Process Steps V School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion Doping Process Steps VI School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Dopant Oxide Deposition School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Cap Oxidation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Drive-In School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Drive-In School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Strip Oxide School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion: Limitations & Applications School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion: Applications – Drive In School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion: Applications – Well Implantation & Drive In School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion: Applications – Boron USJ Formation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Diffusion: Applications – Boron USJ Formation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Processes ANNEALING School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Post- Implantation Annealing I School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Post- Implantation Annealing II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Before Ion Implantation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication After Ion Implantation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication After Ion Implantation School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Annealing I School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Annealing II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Annealing II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Annealing: Summary I School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Annealing: Summary II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Annealing: Summary III School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Processes RTP School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Rapid Thermal Processes: Introduction School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Rapid Thermal Processes: Introduction School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication RTP Chamber School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Annealing & Dopant Diffusion I School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Annealing & Dopant Diffusion II School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Anneal Rate vs. Diffusion Rate School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Dopant Diffusion After Anneal School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Advantages of RTP over Furnace School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication RTP: Summary KUKUM – SHRDC INSEP Training Program 2006

Microelectronic Fabrication Thermal Processes: Summary School of Microelectronic Engineering KUKUM – SHRDC INSEP Training Program 2006