THE PREPARATION OF AlN DOPED ON ZnO TACTILE SENSOR Date : 2017/05/28 THE PREPARATION OF AlN DOPED ON ZnO TACTILE SENSOR Reporter :Yu-Jie Shen

Outline 1 2 3 4 5 Introduction Purpose Experimental Method Results and Discussions Conclusion 1 2 3 4 5

Figure 1. The schematic of Da Vinci surgical system[2]. Introduction The world of biosensors is expanding at a rapid pace with an ever increasing demand for more sensitive miniaturized devices[1]. In addition, the tactile sensor can be applied on the minimal invasive surgery. Figure 1. The schematic of Da Vinci surgical system[2].

Purpose To fabricate the force-feedback sensor based on the piezoelectric thin film. To measure and define the relationship between the feedback electric current of bio-tissue. In this study we will improve the accuracy and efficiency of surgery under the tactile tools. 在這項研究中，我們將提高下觸覺感測的準確性和手術的效率。

Piezoelectric Principle Piezoelectric effect is the ability of certain materials to generate an electric charge in response to applied mechanical stress[3]. Figure 2. Voltage applied to piezoelectric mater causes it to change shape[4]. 

Zinc Acetate Dihydrate Solution parameters Name Chemical formula Purity Viscosity PH Zinc Acetate Dihydrate Zn(CH3COO)2∙2H2O 98% 6-7 Aluminum Nitride AlN 99.5%, 65-75 nm, Hexagonal Ethylene Glycol C2H6O2 99% 21CPS 6-7.5 Ethanol C2H5OH 99.4% 1.2CPS 7 Triethanolamine C6H15NO3 10.5 Table 1. The parameters of AlN Doped ZnO solution.

High temperature furnace Process parameters Temperature Time Spin coating Room temperature 600 RPM 800 RPM 1000 RPM Heating 150 ℃ 25 Mins High temperature furnace 200 ℃ 250 ℃ 1 Hour Table 2. The parameters of AlN Doped ZnO process.

Flow chart of fabrication Ethanol Glycol Zinc acetate Triethanolamine Stirring was continued for three hours holding the temperature 80 ℃ Aluminum Nitride Deposition of 24hr Atmospheric plasma Spain coating At 150˚C for 25min three time High temperature furnace In the next sildes will explain the process in detail X-ray Diffraction (XRD) Scanning Electron Microscopy (SEM) Oscilloscope test piezoelectric film

Powder preparation Rigorous stirring Deposition of 24hr Atmospheric plasma High temperature furnace Baking Spin coating

Measurement

Results & Discussion(1/6) (a) (b) (c) Figure 3. The SEM photograph of AlN doped ZnO thin film, spin coating speed (a) 600 RPM (b) 800 RPM (c) 1000 RPM (annealing temperature:200°C)

Results & Discussion(2/6) (a) (b) (c) Figure 4. The SEM photograph of AlN doped ZnO thin film, spin coating speed (a) 600 RPM (b) 800 RPM (c) 1000 RPM (annealing temperature:250°C)

Results & Discussion(3/6) (a) (b) signal Figure 5. The XRD of AlN doped ZnO thin film with different spin coating speed (a)annealing temperature at 200℃ ; (b) annealing temperature at 250℃.

Results & Discussion(4/6) Figure 6. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (600 RPM).

Results & Discussion(5/6) Figure 7. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (800 RPM).

Results & Discussion(6/6) Figure 8. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (1000 RPM).

Conclusion In this study, the fabrication of the force-feedback sensor based on the piezoelectric thin film is developed. The relationship between the output voltage and applied force is presented. The best force-feedback response is 1000 RPM on the copper.

References [1] http://allaboutroboticsurgery.com/surgicalrobots.html [2] Paul J. Johnson, MS, David E. Schmidt, PhD, and Umamaheswar Duvvuri, MD, PhD“Output control of da Vinci surgical system’s surgical graspers”, Science Direct, Vol. 186, pp.56-62, 2014. [3] Yingbin Bian, Moning Liua, Genshui Ke, Yigang Chen, Jim DiBattista, Eason Chan, Yimou Yang“Aluminum nitride thin film growth and applications for heat dissipation” Surface & Coatings Technology, Vol. 267. pp. 65-69, 2015. [4] David T.W. Lin, You-Peng Yuan, Yuh Chung Hu“Fabrication of ZnO Thin Film Sensor for CO2 Monitoring.” IEEA Environment, Energy and Applications, 2015.

Thank you for your attention That’s all my presentation, thank you for your attention.