SEMINAR 1. Title: Thin Film Process Technology for AMOLED Display

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SEMINAR 1. Title: Thin Film Process Technology for AMOLED Display 2. Speaker: Prof. Heeyeop Chae 3. Time: 2015. 3. 27. 3:00pm 4. Place :: e+ Lecture Hall (room 83188), 2nd Research Building, Sungkyunkwan University (SKKU) 5. Summary : Various thin film process technologies for AMOLED display will be discussed in this lecture. The following thin film deposition and patterning technologies will be discussed in this lecture. - Plasma enhanced chemical vapor deposition (PECVD) process - Crystallization process - Ion implantation process - Metal thin film deposition process - Photolithography process - Plasma etching process - Atomic layer deposition process 6 Background : Education 2000. 2. M.I.T. , Ph.D. in chemical engineering 1992. 8 Seoul National University, M. Eng. in chemical engineering 1990. 2. Seoul National University, B. S. in chemical engineering Work 2004. 3 – Current , Sungkyunkwan University (SKKU), School of Chemical Engineering, Professor 2000. 3. – 2004. 2 Applied Materials, Inc., Senior Process Engineer 1993. 1 – 1993.6 KIST, Commissioned Researcher