SEMI Standards for Equipment Automation

Solution: SEMI Equipment Communication Standards (SECS) 6/17/2018 Solution: SEMI Equipment Communication Standards (SECS) What are the SEMI Equipment Communication Standards?? International Industry standards covering everything from wafers, to equipment hardware, to cleanroom metrics, to safety standards, and equipment automation standards Equipment Automation Software Standards SECS-I - Message Transport, RS-232 (E4) – not used for 300mm SECS-II - Message Content (E5) HSMS - High-Speed Message Services (E37) HSMS-SS - High-Speed Message Services, Single-Session E37.1 TCP/IP based protocol designed to replace SECS-I GEM - Generic Equipment Model (E30) Object Services (E39) Process Job Management (E40) Carrier Management (E87) Substrate Tracking (E90) Control Job Management (E94) Equipment Performance Tracking (E116) 300mm Standards Cimetrix Confidential 7

SEMI Equipment Communication Standards (SECS) Equipment Automation Application GEM ( E 30 ) SECS - II ( E 5 ) HSMS ( E 37 ) Factory Host

Solution: SEMI Equipment Communication Standards (SECS) 6/17/2018 Solution: SEMI Equipment Communication Standards (SECS) Why use SECS?? Increase Supplier Profitability Reduces development costs and Increases reliability Allows focus on unique value-added features Helps Ensure product acceptance Increase End-User (IC Maker) Satisfaction Reduces factory integration costs and production ramp time Lowers manufacturing costs Clarifies expectations for suppliers Meets Manufacturing Business Requirements Provides Capabilities in Each Target Area Availability of cost effective, Real-world-proven commercial solutions Minimize time-to-market & cost of integration Meets Technology Requirements Platform independent Industry standard, non-proprietary, open, extendable architecture Proven for Mission critical applications Cimetrix Confidential 9

SEMI Equipment Communication Standards (SECS) - Timeline 6/17/2018 SEMI Equipment Communication Standards (SECS) - Timeline 1978 1980 1982 1984 1986 1988 1990 1992 1994 1996 1998 1999 2000 2001 2002 2003 2004 SECS-I SECS-II GEM (E30) HSMS (E37) 300MM Object Services (E39) Process Job (E40) Carrier Management (E87) Substrate Tracking (E90) Control Job (E94) Equipment Performance Tracking (E116) Cimetrix Confidential 8

SEMI Standards Committees Relevant Equipment Automation Software Standards are managed by the North America Information and Control Committee (NA I&CC) Cimetrix Participates on various NA I&CC Task Forces The 300mm standards are being managed primarily by the GEM 300 TF The Interface A standards are being managed primarily by the DDA TF

Reading SEMI Standards Skip E4 – most work we will do uses HSMS (E37) which we will review in this training E5 (SECS-II messages) is a “dictionary” of data items and messages to be used as a reference only. GEM (E30) – This is a good place to start. Describes fundamental capabilities and is relatively “readable”. (sematech documents) 300mm Standards Reading Order Control Job (E94) and Process Job (E40) Carrier Management (E87) Substrate Tracking (E90) Equipment Performance Tracking (E116) Cimetrix Sequence Diagrams CIM300 Expert Related Work (as needed) AMHS Parallel I/O interface (E84) Carrier ID Reader (E99) User Interface Guidelines (E95) SEMI Documents are typically published with a suffix noting the revision (e.g E87-0304 = March 2004 revision)

The SECS-I Protocol Point-to-Point Asynchronous RS232 connection Host 6/17/2018 The SECS-I Protocol Point-to-Point Asynchronous RS232 connection Host SECS-I Equipment Cimetrix Confidential

The SECS-I Protocol 254-byte blocks, Multi-block messages 6/17/2018 The SECS-I Protocol 254-byte blocks, Multi-block messages 10-byte header (Preceded by Length) 10-byte Header Data (0-244 Bytes) Block #1 Block #2 Block #3 Message Data R W E Block Length Device ID Block # System Bytes Stream Function Cimetrix Confidential

The SECS-I Protocol The SECS-I Block Protocol SECS-I Transaction 6/17/2018 The SECS-I Protocol The SECS-I Block Protocol SECS-I Transaction Sender Receiver ENQ SECS Block EOT ACK Sender Receiver Primary Message Reply Message Cimetrix Confidential

The SECS-I Protocol SECS-I Protocol Timeouts 6/17/2018 The SECS-I Protocol SECS-I Protocol Timeouts T1 - Inter character Timeout Limits the time between receipt of characters within a block. T2 - Block Protocol Timeout Limits the time between sending ENQ and receiving EOT, sending EOT and receiving the length byte, and sending the second checksum byte and receiving any character T3 - Reply Timeout Is a limit on the length of time to wait after a primary message has been sent and before the arrival of the reply. T4 - Inter-block Timeout The time interval between the successful receipt of a block in a multiblock message. Cimetrix Confidential

The SECS-I Protocol SECS-I Protocol Timeouts (cont.) 6/17/2018 The SECS-I Protocol SECS-I Protocol Timeouts (cont.) Set up SECS-I parameters at Equipment for compatibility with Host. Set Baud Rate and Device ID according to Host requirements The SECS timeout settings on the Equipment need to be large enough to allow for inefficient Host software. Assume worst-case scenarios. T1 = 5.0 seconds T2 = 10.0 seconds T3 = 90 seconds T4 = 60 seconds Retry = 5 Timeout settings on the Host should be compatible with Equipment requirements. Operator should be able to configure settings Cimetrix Confidential

SEMI Communication Standards E37 and E37.1 6/17/2018 The HSMS Protocol SEMI Communication Standards E37 and E37.1 Cimetrix Confidential

HSMS Protocol High-Speed Message Task Force Objectives Methods 6/17/2018 HSMS Protocol High-Speed Message Task Force Objectives Faster than RS-232 Independent Implementations are Interoperable Maximum Commodity Content (Easy to Build) Wide Platform Choice Propose a Solution Quickly Methods Use TCP/IP (Widely Available) Use TCP/IP Sockets Application Interface Replace SECS-I (E4) with HSMS SECS-II, GEM, and 300mm standards remain unchanged Cimetrix Confidential

6/17/2018 HSMS Protocol HSMS Standards Cimetrix Confidential

The HSMS-SS Protocol Point-to-Point TCP/IP based protocol Host 6/17/2018 The HSMS-SS Protocol Point-to-Point TCP/IP based protocol Host HSMS Equipment Cimetrix Confidential

6/17/2018 HSMS Protocol HSMS is a newer network protocol designed to be a direct replacement for the legacy SECS-I serial protocol Cimetrix Confidential

HSMS Protocol HSMS-SS Protocol Control Messages 6/17/2018 Cimetrix Confidential

6/17/2018 HSMS Protocol HSMS-SS State Model Cimetrix Confidential

6/17/2018 Cimetrix Confidential

SEMI Communication Standard E5 “What to Send” The SECS-II Protocol SEMI Communication Standard E5 “What to Send”

SECS-II Message Definitions 6/17/2018 SECS-II Message Definitions The SECS-II standard defines the data formats and usage of hundreds of standard messages, and allows for user-defined messages A SECS-II message definition is “self-descriptive” defining the number, length, and of the message items. Cimetrix Confidential

Format Code is Data Item Type + Number of Length Bytes The SECS-II Protocol SECS-II Data Items Message Data Checksum Data Item #1 Data Item #2 Data Item #3 Data Item #4 Format 1-3 Length Data Code Bytes Format Code is Data Item Type + Number of Length Bytes

Number of Length Bytes = 1 The SECS-II Protocol Number of Length Bytes = 1 SECS-II Data Item Formats Format Standard (Octal) Hex SML List 00 01 L Binary 10 21 B Boolean (T/F) 11 25 BOOLEAN ASCII 20 41 A JIS-8 21 45 J 8-byte Signed Integer 30 61 I8 1-byte Signed Integer 31 65 I1 2-byte Signed Integer 32 69 I2 4-byte Signed Integer 34 71 I4 8-byte Floating Point 40 81 F8 4-byte Floating Point 44 91 F4 8-byte Unsigned Integer 50 A1 U8 1-byte Unsigned Integer 51 A5 U1 2-byte Unsigned Integer 52 A9 U2 4-byte Unsigned Integer 54 B1 U4

The SECS-II Protocol SECS-II Stream and Function Notation Stream Number - Message Category (Topic) Streams 0-18 Currently Defined in the Standard Streams 19-63 Reserved for Standard Messages Streams 64-127 Reserved for User Defined Messages Function Number - Specific Message Functions 0-64 Reserved for Standard Messages Functions 65-254 Reserved for User Defined Messages

The SECS-II Protocol SECS-II Messages Examples: Stream 5 - Alarm Management Stream 5, Function 1 = Alarm Report (E->H) Stream 5, Function 2 = Alarm Report Acknowledge (E<-H) Stream 7 - Process Program Management Stream 7, Function 3 = Process Program Send (E<->H) Stream 7, Function 4 = Process Program Send Acknowledge (E<->H) Stream 7, Function 5 = Process Program Request (E<->H) Stream 7, Function 6 = Process Program Data (E<->H)

Reading SEMI Standards – SECS Messages 6/17/2018 Reading SEMI Standards – SECS Messages S1, F16 Off-line Acknowledge <OFLACK> S2, F18 Date and Time Data <TIME> S1, F13 Establish Communications Request L, 2 <MDLN> <SOFTREV> S6, F11 Event Report Send L,3 <DATAID> <CEID> L,n <RPTID> L, m <V1> ... Cimetrix Confidential

The Generic Equipment Model (GEM) SEMI Communication Standard E30 “Specific Set of What to Send and Specific Capabilities to Support”

The Generic Equipment Model (GEM) Requirements for implementing SECS interfaces on Equipment Specifies a set of required messages and capabilities Specifies other implementation requirements such as data item formats, text lengths, trace counts, number of limits, etc. Specifies operator front panel requirements Specifies required equipment state models GEM Compliance Statement

The Generic Equipment Model (GEM) Why? To reduce cost of integration into factory automation systems Improve quality of Equipment SECS Interface $500K Source: Intel, 1988 $250K Without GEM $50K with GEM 1988 1994 50% of Problems Related to Embedded Equipment Software Source: IBM, 1992

The Generic Equipment Model (GEM) GEM Equipment Capabilities Process State Model Establish Communications Data Collection Alarm Management Remote Control Equipment Constants Process Program (Recipe) Management Material Movement Equipment Terminal Services Error Messages Clock Spooling

E30 - Generic Equipment Model (GEM)

GEM Equipment Capabilities

State Models Required GEM State Models Process State Model (Equipment Specific) Communication State Model Alarm State Model Control State Model Material Movement State Model (Equipment Specific) Spooling State Model

State Models Harel Notation David Harel (Author) “Statecharts: A Visual Formalism for Complex Systems” Science of Computer Programming, 1987, Elsevier Science Publishers

State Models Equipment Process State Model

Establish Communications Requirements Communication State Model Operator Communication State display Operator Enable/Disable commands Power-Up State (Enabled/Disabled) Establish Communications Timer Equipment Constant

Establish Communications Communication State Model An Equipment Constant (EC) determines whether the application starts up in the DISABLED or ENABLED / NOT COMMUNICATING state.

Establish Communications Establish Communication Scenarios Either the Equipment or Host can send the S1F13 Connect Request Message to Establish Communications H E Connect Request S1F13 Acknowledge S1F14 The Equipment will periodically send the S1F1 “Heartbeat” message to check the Host link. Are You There S1F1 Online Data S1F2

Data Collection Requirements Collection Events Host Defined Event Reports Host Enable/Disable of Report Send Maintain Disk File for Report Definitions and Enable Status Status Data Collection Variable Data Collection Trace Data Collection Variable name list request Host Limits Monitoring On-line Identification

Data Collection Event Report Definition Scenario Host Defines Event Report H E Event Report Definition S2F33 Acknowledge S2F34 Host Links Reports to Events H E Link Report to Event S2F35 Acknowledge S2F36 Host Enables Event Reporting H E Enable Event S2F37 Acknowledge S2F38

Data Collection Event Report Scenario Equipment Data can be uploaded to the Host automatically in an Event Report Message. H E Multi-block Inquire S6F5 Multi-block Grant S6F6 Event Report S6F11 Report Acknowledge S6F12 SECS-II Requires the Equipment to use this Multi-Block Inquire/Grant transaction before sending a large Event Reports.

Data Collection Event Report Request Scenarios Host Requests Event Report Data by CEID H E Event Report Request S6F15 Report Data S6F16 Host Requests Event Report Data by RPTID Event Report Request S6F19 Report Data S6F20

Data Collection Host Status Variable Request Scenarios Host Requests Status Variable Values H E Status Data Request S1F3 Status Variable Values S1F4 Host Requests Status Variable Namelist Namelist Request S1F11 Status Variable Names S1F12

Data Collection Host Status Variable Request Scenarios (cont.) Host Requests Online Data H E “Are You There” S1F1 Online Data S1F2

Data Collection Time Driven Trace Scenarios Host Defines Trace Data H E Trace Definition S2F23 Acknowledge S2F24 Equipment Reports Trace Data Trace Data S6F1 Acknowledge S6F2

Alarm Management Requirements Set of Alarms for operator, equipment, and material safety Enabled/Disabled states on must be saved on disk Host Alarm Data Request Alarms must have SET and CLEAR states Note Collection Event when each alarm is SET and CLEAR

Alarm Management Alarm States The Equipment should signal a Collection Event for each Alarm State Transition. Thus, the Equipment will send an S5F1 (Alarm Report) and S6F11 (Event Report) for each state transition, totalling 4 messages for each alarm. However, to reduce message traffic, the Host can disable either the reporting of the alarm, or the reporting of the event, or both ALARM SET (ON) CLEAR (OFF)

Alarm Management Alarm Reporting Scenarios The Equipment reports alarms to the Host as they occur. H E Alarm Report S5F1 Report Acknowledge S5F2 Event Report S6F11 Report Acknowledge S6F12 The Host can enable or disable the reporting of an alarm. H E Alarm Enable/Disable S5F3 Acknowledge S5F4

Alarm Management Alarm Data Request Scenarios The Host can request the list of alarms on the equipment. H E Alarm Data Request S5F5 Alarm Data S5F6 The Host can request the list of set alarms. Alarm Data Request S5F7 Alarm Data S5F8

Remote Control Requirements Control State Model Status Variables, and Events Minimum START and STOP Remote Commands Control State Display and Operator Commands Appropriately accept/deny Operator and Host commands in ONLINE sub-states

Remote Control Control State Model Three Equipment Constants determine the equipment’s power-up Control State. The operator display should indicate the current Control State.

Remote Control Host Online/Offline Scenarios Host Sets the Equipment Offline H E Offline Command S1F15 Acknowledge S1F16 Host Sets the Equipment Online Online Command S1F17

Remote Control Remote Command Scenario The S2F41 Message (Remote Command with Parameters) H E Remote Command S2F41 Command Acknowledge S2F42

Equipment Constants Requirements Non-volatile storage Validation and Verification for EC change Host EC Namelist request message Host Sets New Equipment Constant Message Host Requests Equipment Constant Values Maintains Disk File for Equipment Constants Provide for Operator changing of Equipment Constants Provide Operator EC Change Event and variable indicating VID of the changed EC

Equipment Constants Host EC Management Scenarios Request Equipment Constant Values H E EC Request S2F13 EC Value S2F14 Request Equipment Constant Namelist H E EC Namelist Request S2F29 EC Namelist S2F30 Set Equipment Constant Value H E New EC Values S2F15 Acknowledge S2F16

Process Program (Recipe) Management Requirements Equipment must provide a Process Program Editor CEID for Process Program change, create, or delete Non-volatile disk storage of Process Program Library Host initiated upload, download, delete, and directory request Equipment (Operator) initiated upload and download Support either Formatted or Unformatted Process Program Messages or both Process Program Verification

Process Program Management Equipment (Operator) Initiated Scenarios Process Program Upload: H E Multi-block Inquire S7F1 Multi-block Grant S7F2 Process Program Data S7F3 Acknowledge S7F4 Process Program Download: PP Request S7F5 Process Program Data S7F6 SECS-II Requires the Equipment to use this Multi- Block Inquire/Grant transaction before sending a large S7F3 (Process Program Send) message.

Process Program Management 6/17/2018 Process Program Management Host Initiated Process Program Scenarios Process Program Upload: H E PP Request S7F5 Process Program Data S7F6 Process Program Download Multi-block Inquire S7F1 Multi-block Grant S7F2 Process Program Data S7F3 Acknowledge S7F4 Cimetrix Confidential

Process Program Management Host Initiated Process Program Scenarios Host Deletes Process Program H E Delete S7F17 Acknowledge S7F18 Host Requests Process Program Directory H E Directory Request S7F19 Process Program Directory S7F20

Material Movement Requirements Provide variables and events indicating when material is sent or received at a port (Port State Model) Define variables and events required to relate status of material and material ports Provide a Material ID (Lot ID) - ASCII 16-bytes

Equipment Terminal Services Requirements Provide display capability of at least 160 characters CEID for Operator acknowledgment of Host message Provide means for text entry for Operator New messages should overwrite existing message 0-length message should clear display

Equipment Terminal Services Terminal Services Scenarios Operator sends text message to the Host H E Text Message S10F1 Acknowledge S10F2 Host sends text to be displayed for the Operator on the Equipment’s Front Panel H E Text Message S10F3 Acknowledge S10F4

Error Messages Requirements Detect communication link errors (SECS-I) Detect SECS-II and GEM format errors Support all Stream 9 messages Provide appropriate error handling

Error Messages Communication Error Message Scenarios The Equipment will send these messages to report specific communication errors. H E Invalid Device ID S9F1 Invalid Stream Number S9F3 Invalid Function Number S9F5 Invalid Data Format S9F7 Reply Timeout (T3) S9F9 Invalid Data Length S9F11

Clock Requirements Maintain accurate system clock Provide capability for Host to set date and time Provide capability for Equipment to request date and time from Host (optional)

Clock Clock Management Scenarios Equipment Requests Date and Time from Host H E Date/Time Request S2F17 Date and Time S2F18 Host Requests Date and Time from Equipment Date/Time Request S2F17 Date and Time S2F18 Host Sets Equipment Date and Time Date/Time Set S2F31 Acknowledge S2F32

Spooling Requirements Provide sufficient Non-volatile storage for all primary messages that would normally occur during a processing cycle (Maximum Spool File Size) Maintain Spooling State Model Operator Spool State Display Secondary (Reply) and Stream 1 messages are not spooled All spooling-related variables and setup information should be maintained in non-volatile storage, and will retain all spooling context across a power-off Resolve Multi-Block Inquire/Grant transactions during spool transmit

Spooling Spooling State Model At startup, the equipment returns to the spool state it was in prior to the system shutdown. The only way for the equipment can return to the Spool Inactive state is for the Host to empty the spool with an S6F23 message. Messages going to Host Messages going to Disk Messages going to Host from Disk

Spooling Host Spool Management Scenarios Reset Spooling - Host Specifies Messages to be spooled H E Spool Reset S2F43 Acknowledge S2F44 Host Requests Spool Transmit or Purge H E Transmit/Purge Request S6F23 Acknowledge S6F24

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