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Results and Discussion 354nm ; 0.131A/W 357nm ; 0.129A/W 356nm ; 0,13 A/W Spectral responsivities of nitride-based p-i-n bandpass photodetectors at room temperature.

η:quantum efficiency(量子效率) R:measured responsivity(響應) q :electron charge(基本電荷1.62×10-19) λ:incident light wavelength(入射光波長) h :Planck constant(普郎克常數6.62 ×10-32) c :speed of light(光速率2.99 ×1010 )

by: Sample A 0.131= η × ( 1.6 × 10-19 × 354 × 10-9)/(6.626 × 10-34 × 2.99 ×108) η = 0.46 × 100%≒46 % Sample B 0.129= η × ( 1.6 × 10-19 × 357 × 10-9)/(6.626 × 10-34 × 2.99 ×108) η = 0.45 × 100%≒45 % Sample C 0.13= η × ( 1.6 × 10-19 × 356× 10-9)/(6.626 × 10-34 × 2.99 ×108)

Current–voltage characteristics of the nitride-based p-i-n bandpass photodetectors at room temperature with fitting curve. R = (dV=dI) at zero bias.

Conclusion Nitride-based p-i-n bandpass photodetectors with 60-, 150,and 300-nm-thick blocking p-AlGaN layers were successfully fabricated and characterized. The peak responsivities wereestimated to be 0.131, 0.129, and 0.13 A/W at 354, 357,and 356 nm for 60-, 150-, and 300-nm-thick p-Al Ga N blocking layer, respectively, corresponding to a quantum efficiency of around 46%.