Carbon wire sensor based in semiconductor strain gauges CONCEPT Sensor 5 Ceramic isolators Ø 1.2 Sleeve in copper Soldering Carbon Wire 5 Action to be measured by the sensor Fork Arm ~ SCALE 10:1 24.03.2014

Carbon wire sensor based in semiconductor strain gauges Option Description GF Feasibility Remarks Cermet Resistor on alumina Printed Cermet circuit on alumina. Baking cycle 800 Celsius Electrical leads and path for cable soldering metalized in the ceramic ~ 15 Technology is well known   Metal printed circuit on ceramic Printed circuit on alumina. ~ 2 Technology is well known, don’t know if this technology has been used for such sensors ScSG Brazed on ceramic plate Silicon cutting Silicon ends metallization Ceramic metallization Brazing (in vacuum furnace) ~ 100 (expected) Technologies are known don’t know if this technology has been use for sensors. Production process complex. Suitable strain gauge thickness ~ 200um Silicon metallization can change gauge properties. Brazing process could induce residual stress. Silicon material ScSG from SOI SOI wafer etching Electrical lead by metallization of bonding Path for cable soldering metalized Silicon oxide layer Technology is known Examples of application for sensor can be found in the literature SOI material type 24.03.2014

Decide on sensor technology Final prototype design Carbon wire sensor based in semiconductor strain gauges Next steps: Define final requirements i.e, suitable gauge factor, sensor dimensions Fix conceptual design Decide on sensor technology Final prototype design Prototype production Test and characterization Final design Final production 24.03.2014