Date of download: 11/1/2017 Copyright © ASME. All rights reserved. From: Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition J. Tribol. 2016;138(3):031301-031301-6. doi:10.1115/1.4031995 Figure Legend: Field-emission scanning electron microscopy (FESEM) micrographs showing surface morphologies of DLC films deposited with negative substrate biases of (a) −50, (b) −200, and (c) −300 V. The white arrows indicate the sizes of grains on the surface morphologies of DLC films.

Date of download: 11/1/2017 Copyright © ASME. All rights reserved. From: Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition J. Tribol. 2016;138(3):031301-031301-6. doi:10.1115/1.4031995 Figure Legend: SEM micrograph showing cross-sectional view of DLC film deposited with a negative substrate bias of −50 V

Date of download: 11/1/2017 Copyright © ASME. All rights reserved. From: Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition J. Tribol. 2016;138(3):031301-031301-6. doi:10.1115/1.4031995 Figure Legend: Raman spectra of DLC films deposited with different negative substrate biases

Date of download: 11/1/2017 Copyright © ASME. All rights reserved. From: Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition J. Tribol. 2016;138(3):031301-031301-6. doi:10.1115/1.4031995 Figure Legend: Results from Raman spectra of DLC films shown in Fig.3: (a) peak positions, (b) FWHMs, and (c) ID/IG ratios of D and G peaks

Date of download: 11/1/2017 Copyright © ASME. All rights reserved. From: Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition J. Tribol. 2016;138(3):031301-031301-6. doi:10.1115/1.4031995 Figure Legend: (a) Coefficients of friction of DLC films deposited with different negative substrate biases, slid against a 100Cr6 steel ball of 6 mm in diameter in a circular path of 1 mm in radius for 20,000 laps at a sliding speed of 1 cm/s under different normal loads. Coefficients of friction of the same samples, slid under normal loads of (b) 1 and (c) 4 N, as a function of the number of laps.

Date of download: 11/1/2017 Copyright © ASME. All rights reserved. From: Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition J. Tribol. 2016;138(3):031301-031301-6. doi:10.1115/1.4031995 Figure Legend: Wear widths and depths of DLC films deposited with different negative substrate biases, tested under the same conditions as described in Fig. 5

Date of download: 11/1/2017 Copyright © ASME. All rights reserved. From: Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition J. Tribol. 2016;138(3):031301-031301-6. doi:10.1115/1.4031995 Figure Legend: SEM micrographs showing surface morphologies of worn DLC films deposited with negative substrate biases of ((a) and (b)) −50 and ((c) and (d)) −300 V, slid against a 100Cr6 steel ball of 6 mm in diameter in a circular path of 1 mm in radius for 20,000 laps at a sliding speed of 1 cm/s under normal loads of ((a) and (c)) 1 and ((b) and (d)) 4 N

Date of download: 11/1/2017 Copyright © ASME. All rights reserved. From: Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition J. Tribol. 2016;138(3):031301-031301-6. doi:10.1115/1.4031995 Figure Legend: Energy-dispersive X-ray spectroscopy (EDX) spectra measured on DLC films deposited with negative substrate biases of ((a) and (b)) −50 and ((c) and (d)) −300 V, slid against a 100Cr6 steel ball of 6 mm in diameter in a circular path of 1 mm in radius for 20,000 laps at a sliding speed of 1 cm/s under a normal load of 4 N, at different locations of (a) A and (b) B in Fig. 7(b) and (c) C and (d) Din Fig. 7(d)