Probe-card Healthness Check-up

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Presentation transcript:

Probe-card Healthness Check-up Liu Dan & Yang Qiulian Yonsei University KoALICE National Workshop 2016

Contents Introduction Background and Objective Setup Check-up List Contact Test Needle Inspection Summary

Introduction Sensor（MAPS） Sensor image Pad map 3 cm x 1.5 cm x 0.05 cm 67 pads Probecard Needle Operation

Background & Objective The probe-card is used repeatedly in the sensor test by the automated test equipment(ATE). For efficient operation, we need to maintain key elements including probecards in good condition. Therefore, we need to check probecard healthness regularly.

Setup Hardware Software Test program Sensor Probe station Power supply Probecardv3

Check-up list Needle Inspection Contact test 2. Prober check-up LED display Scratch marks on pad PC communication with probe card 2. Prober check-up Needle Inspection

Contact test LED display Scratch marks on pad 8 LED bits Many overlapping scratch marks

PC communication with probecard Software: probecardv3

Needle inspection 1. Find out the strange needles. Typical one Damaged one Damaged one Damaged one

2. Inspect the location of the damaged needle tips a) Check the needle position in (x,y) plane. b) Check the planarity of the needle tips.

Needle position

a). Check x-y position Calibrate pixel size with good needle pairs. (9473.64,9906.88) um (26,190) pixel 1 pixel = 13.87 micron (5789.40,9906.88) um (302, 190) pixel Calibrate pixel size with good needle pairs. Check the distance with the needle image.

b). Check planarity. When needle tip is not at focal point, needle tip image blurs. Procedure to determine the needle tip height accurately is under development.

Summary Probecards need regular check-up for the efficient operation of the ATE. We are detailing the procedure to verify the probecard health.