Getting Started with TWB Process & Device Simulation Getting Started with TWB School of Microelectronic Engineering

Right click > new terminal At the prompt, type: twb& A workspace window will pop up. Workspace is the top-level window that displays Projects and network Machines Each column in the projects page represents a project (book icon) A book icon with and without pencil indicates write access to the project and read only, respectively Each project consists of a Library and a list of Experiments Double-click the book symbol will open the project Library and the icon changes to an open book ©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

Process recipe is represented by a graph of Modules Double click one of the experiment. An experiment window will be displayed. Experiment consists of process recipe, wafer flow, edit, toolkit, drivers. Process recipe is represented by a graph of Modules Wafer flow contains the wafer tree. Each wafer is associated to the left side module ©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

Double click one of the module to open the module window Each module contains commands and parameters and uses driver to perform simulation Command builder stores all the commands and parameters ©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

Getting Started with TWB Driver invokes a simulator, load a structure file from previous simulation and save file for further simulation Drag and drop suitable driver such as MEDICI for device simulation and TSUPREM4 for process simulation ©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

The wafer is a collection of simulation data Double click the wafer to view data from various files Various wafer icons show different simulation status Simulation done with no error Simulation fail, double click to see error message Simulation is running No action ©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

Toolkit is typically set for data visualization To visualize data, drag and drop wafers onto suitable toolkit ©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

Your username & Password: E.g. For PC no. 1: Username: semicond21 Password: phys21 For PC no. 2: Username: semicond22 Password:phys22

Next lab session, please bring a FLOPPY DISC to save files for your basic lab report