Date of download: 11/15/2017 Copyright © ASME. All rights reserved. From: Influences of Specimen Size and Temperature on Viscoelastic Tensile Properties of SU-8 Photoresist Films J. Eng. Mater. Technol. 2016;138(2):021002-021002-5. doi:10.1115/1.4032320 Figure Legend: Photograph of fabricated SU-8 specimen used for uniaxial tensile test. The photo was shot after Pt coating on SU-8.

Date of download: 11/15/2017 Copyright © ASME. All rights reserved. From: Influences of Specimen Size and Temperature on Viscoelastic Tensile Properties of SU-8 Photoresist Films J. Eng. Mater. Technol. 2016;138(2):021002-021002-5. doi:10.1115/1.4032320 Figure Legend: Photographs of specially developed uniaxial tensile test equipment for thin films. The equipment is able to precisely apply tensile force to a film specimen. A CCD camera is set in the overhead of a specimen for tensile elongation measurement without contact. The equipment is set in a vacuum chamber to conduct quasi-static tensile tests and stress relaxation tests at intermediate temperatures without oxidation.

Date of download: 11/15/2017 Copyright © ASME. All rights reserved. From: Influences of Specimen Size and Temperature on Viscoelastic Tensile Properties of SU-8 Photoresist Films J. Eng. Mater. Technol. 2016;138(2):021002-021002-5. doi:10.1115/1.4032320 Figure Legend: Representative tensile stress–strain relations of the SU-8 specimens. It is found that both the test temperature and specimen thickness dependences on the stress–strain behaviors.

Date of download: 11/15/2017 Copyright © ASME. All rights reserved. From: Influences of Specimen Size and Temperature on Viscoelastic Tensile Properties of SU-8 Photoresist Films J. Eng. Mater. Technol. 2016;138(2):021002-021002-5. doi:10.1115/1.4032320 Figure Legend: The Young's modulus and fracture strain for SU-8 as a function of test temperature

Date of download: 11/15/2017 Copyright © ASME. All rights reserved. From: Influences of Specimen Size and Temperature on Viscoelastic Tensile Properties of SU-8 Photoresist Films J. Eng. Mater. Technol. 2016;138(2):021002-021002-5. doi:10.1115/1.4032320 Figure Legend: Constructed master curves of relaxation modulus for SU-8 specimens by means of stress relaxation tests. Reference temperature was set to be 411 K.

Date of download: 11/15/2017 Copyright © ASME. All rights reserved. From: Influences of Specimen Size and Temperature on Viscoelastic Tensile Properties of SU-8 Photoresist Films J. Eng. Mater. Technol. 2016;138(2):021002-021002-5. doi:10.1115/1.4032320 Figure Legend: Relationship between test temperature and time-temperature shift factor used for making the master curves of relaxation modulus based on the time-temperature reduction law. The slopes for each specimen indicate apparent activation energies in glassy and rubbery states.

Date of download: 11/15/2017 Copyright © ASME. All rights reserved. From: Influences of Specimen Size and Temperature on Viscoelastic Tensile Properties of SU-8 Photoresist Films J. Eng. Mater. Technol. 2016;138(2):021002-021002-5. doi:10.1115/1.4032320 Figure Legend: Representative FTIR spectra for the SU-8 specimens. There are two differences, transmittances for epoxy radical and ether linkage, in the spectra.